Closed-form solution for static pull-in voltage of electrostatically actuated clamped–clamped micro/nano beams under the effect of fringing field and van der Waals force

Bhojawala, V. M.; Vakharia, D. P.

doi:10.1088/2053-1591/aa9afb

Cited by 4 publications

(1 citation statement)

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“…In nanoscale, electrostatic actuators suffer from surface forces, such as van der Waal and electrostatic forces [77][78][79]. An electrostatically actuated clamp-clamp micro/nano beam static pull-in voltage closed-loop solution under the action of fringe fields and van der Waals forces was presented in [80]. The stress instability of double-pressed nanocon ductors evaluating electrostatic and intermolecular forces was investigated in [78].…”

Section: Mathematical Modeling and Main Issuesmentioning

confidence: 99%

Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

Morkvėnaitė-Vilkončienė

Bučinskas

Subačiūtė-Žemaitienė

et al. 2022

Micromachines

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The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing suitable methods. This paper provides an effort to classify electrostatic actuators and create a system in the variety of existing devices. Here is overviewed and classified a wide spectrum of electrostatic actuators developed in the last 5 years, including modeling of different designs, and their application in various devices. The paper provides examples of possible implementations, conclusions, and an extensive list of references.

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