Clustering effects in plasma-assisted chemical fluid deposition of copper: Similarities between deposition rate and density fluctuation

Ito, Tsuyohito; Tamura, Tomoya

doi:10.1016/j.cplett.2010.12.038

Cited by 4 publications

(1 citation statement)

References 24 publications

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“…In another study, plasma-assisted chemical fluid deposition in scCO 2 was used to deposit copper films on Si substrates [132]. It was found that the film deposition rate at the centre of the deposition reached its highest value for conditions near the pressure that corresponded to the density fluctuation maximum, which indicated the effect of clustering on the film deposition.…”

Section: Applicationsmentioning

confidence: 99%

Review on plasmas in extraordinary media: plasmas in cryogenic conditions and plasmas in supercritical fluids

Stauss

Muneoka

Terashima

2018

Plasma Sources Sci. Technol.

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Plasma science and technology has enabled advances in very diverse fields: micro-and nanotechnology, chemical synthesis, materials fabrication and, more recently, biotechnology and medicine. While many of the currently employed plasma tools and technologies are very advanced, the types of plasmas used in micro-and nanofabrication pose certain limits, for example, in treating heat-sensitive materials in plasma biotechnology and plasma medicine. Moreover, many physical properties of plasmas encountered in nature, and especially outer space, i.e. very-low-temperature plasmas or plasmas that occur in high-density media, are not very well understood. The present review gives a short account of laboratory plasmas generated under 'extreme' conditions: at cryogenic temperatures and in supercritical fluids. The fundamental characteristics of these cryogenic plasmas and cryoplasmas, and plasmas in supercritical fluids, especially supercritical fluid plasmas, are presented with their main applications. The research on such exotic plasmas is expected to lead to further understanding of plasma physics and, at the same time, enable new applications in various technological fields.

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Section: Applicationsmentioning

confidence: 99%

Review on plasmas in extraordinary media: plasmas in cryogenic conditions and plasmas in supercritical fluids

Stauss

Muneoka

Terashima

2018

Plasma Sources Sci. Technol.

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High permittivity induced by interaction between PI matrix and graphite oxide filler

Lai

Kou

et al. 2014

Chemical Physics Letters

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Pressure effect on ZnO nanoparticles prepared via laser ablation in water

Kulinich¹,

Kondo²,

Shimizu³

et al. 2013

Journal of Applied Physics

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ZnO nanoparticles were prepared via laser ablation of metallic Zn in neat deionized water at pressures up to ∼31 MPa and at constant ablation time, fluence, and wavelength. The high-pressure products were compared with those prepared at 1 atm, and the effect of water pressure on the product size and photoluminescent properties was studied. The results indicate that the use of pressure permits to control the particle size, the position of their exciton emission peak, and the intensity of their visible emission. While smaller and more homogeneous in size ZnO particles were produced at elevated pressures, their UV emission peak blue-shifted and green emission was enhanced. At pressures ∼22 MPa, a discontinuity in the improvement of the product green emission was observed, which should be related to the appearance of supercritical water in the ablated zone.

show abstract

Clustering effects in plasma-assisted chemical fluid deposition of copper: Similarities between deposition rate and density fluctuation

Cited by 4 publications

References 24 publications

Review on plasmas in extraordinary media: plasmas in cryogenic conditions and plasmas in supercritical fluids

Review on plasmas in extraordinary media: plasmas in cryogenic conditions and plasmas in supercritical fluids

High permittivity induced by interaction between PI matrix and graphite oxide filler

Pressure effect on ZnO nanoparticles prepared via laser ablation in water

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