CMOS 2D Hall microsensor with minimal design complexity

Angular position device with 2D low-noise Hall microsensor

“…If the parallel-field Hall device is deep enough, by using four separate sensing contacts only, H 1 -H 2 and H 3 -H 4 , located at the top side of the silicon chip, where one of the terminal pairs is located in the zone of the inside supply contacts [6,9,16], and the other terminal pair is located in the zone outside the supply electrodes [6,9,13], it is possible to achieve maximum sensitivity [15]. So far, in parallel-field Hall microsensors, the Hall voltage has been measured experimentally by two contacts, H 1 and H 2 , and in the elements with minimal design complexity -by one contact H [6,9,11,12,16].…”

“…The innovative task in this research is to design a two-axis Hall magnetometer, which combines the simultaneous measurement of the in-plane magnetic-field components B x and B y and the advantages of the 2D microsensor from [11,14] to reduce sufficiently the 1/f noise level.…”

“…Many different versions of silicon 2D Hall microsensors are available featuring such drawbacks as channels cross-talk, offset, temperature and temporal drift [8][9][10]. A CMOS 2D parallel-field Hall magnetometer with minimal design complexity is also implemented, containing only 4 contacts [11]. Notwithstanding the achieved good results, the relatively high level of internal 1/f noise is not sufficiently well resolved in this 2D vector microsensor.…”

“…Notwithstanding the achieved good results, the relatively high level of internal 1/f noise is not sufficiently well resolved in this 2D vector microsensor. On the other hand, the application of bipolar silicon 2D magnetotransistors encounters certain problems, related to the large channel offsets and temperature drift [8,11,12].…”

“…One possibility to enhance the quality and angle measurement accuracy of angular position instruments based on 2D Hall elements described in [11] is the decrease of the internal 1/f noise. Also, the efficiency of the magnetic modulating system could be improved.…”