CMOS integrated capacitive pressure transducer with on-chip electronics and digital calibration capability

Schöneberg, U.; Schnatz, F.V.; Brockherde, W.; Kopystynski, P.; Mehlhorn, T.A.; Obermeier, Ε.; Benzel, H.

doi:10.1109/sensor.1991.148869

Cited by 18 publications

(4 citation statements)

References 2 publications

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“…The read-out of the devices can be piezoresistive [84,85], capacitive [86,87], optically, through changes in intensity of the reflected light [88,89], or directly interferometric [90,91]. Examples are given in Figure 2.1.13.…”

Section: Pressure Sensorsmentioning

confidence: 99%

Sensors for Catheter Applications

2003

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Minimally invasive techniques enable diagnostics and surgery to be performed through a small incision. This greatly reduces the damage to healthy tissue leading to faster recovery times for the patient. However, the surgeon is deprived of the sensory feedback available with normal surgical techniques. Miniaturised sensors can provide this information about location, diagnostics and the treatment. This application severely limits the size of the device, with some catheters being less than 1 mm in diameter. Catheters are usually defined in multiples of 1/3 mm or 1 french. Further important issues are bio-compatibility, safety and the ability of the sensor to withstand the working environment. Sensors able to meet these demands are improving the efficiency of operations and are opening new opportunities for minimally invasive techniques.

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Section: Pressure Sensorsmentioning

confidence: 99%

Sensors for Catheter Applications

2003

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“…The centre boss contributes most of the capacitance of the structure and its shape does not distort appreciably under applied load. Hence the capacitance-pressure characteristics will be more linear [42][43][44][45].…”

Section: Capacitive Sensorsmentioning

confidence: 99%

Micromachined pressure sensors: review and recent developments

Eaton

Smith

1997

Smart Mater. Struct.

509

242

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Since the discovery of piezoresistivity in silicon in the mid 195Os, silicon-based pressure QsS;i%vI been widely produced. Micromachining technology has greatly benefited from the success of the integrated circuits industry, borrowing materials, processes, and toolsets. Because of this, microelectromechanical ystems (MEMS) are now poised to capture large segments of existing sensor markets and to catalyze the development of new markets.Given the emerging importance of MEMS, it is instructive to review the history of micromachined pressure sensors, and to examine new developments in the field. Pressure sensors will be the focus of this paper, starting from metal diaphragm sensors with bonded silicon strain gauges, and moving to present developments of surfacemicromachined, optical, resonant, and smart pressure sensors. Considerations for diaphragm design will be discussed in detail, as well as additional considerations for capacitive and piezor esistive devices.

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“…To control and monitor fluid flow in these microfluidic devices, there has to be a means of measuring pressure accurately. The majority of micro pressure sensors are diaphragmbased sensors [6][7][8][9][10][11]. These sensors share a common characteristic of having deformable diaphragms.…”

Section: Introductionmentioning

confidence: 99%

An electrokinetic pressure sensor

Kim

2008

J. Micromech. Microeng.

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A new concept for a micro pressure sensor is demonstrated. The pressure difference between the inlet and the outlet of glass nanochannels is obtained by measuring the electrokinetically generated electric potential. To demonstrate the proposed concept, experimental investigations are performed for 100 nm wide nanochannels with sodium chloride solutions having various concentrations. The proposed pressure sensor is able to measure the pressure difference within a 10% deviation from linearity. The sensitivity of the electrokinetic pressure sensor with 10 −5 M sodium chloride solution is 18.5 µV Pa −1 , which is one order of magnitude higher than that of typical diaphragm-based pressure sensors. A numerical model is presented for investigating the effects of the concentration and the channel width on the sensitivity of the electrokinetic pressure sensor. Numerical results show that the sensitivity increases as the concentration decreases and the channel width increases.

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CMOS integrated capacitive pressure transducer with on-chip electronics and digital calibration capability

Cited by 18 publications

References 2 publications

Sensors for Catheter Applications

Sensors for Catheter Applications

Micromachined pressure sensors: review and recent developments

An electrokinetic pressure sensor

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