2021
DOI: 10.1088/1361-6439/ac0514
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CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs

Abstract: The booming growth in environmental conditions sensing and monitoring pushes the need of inexpensive environment sensors with small size and low power consumption. The outbreak of COVID-19 further increases the need for fast monitoring of environment conditions. The micro-electrical-mechanical-systems (MEMS) technologies are considered as promising solutions to realize the required environment sensors. The mature complementary metal-oxide-semiconductor (CMOS) process platforms available in many foundries can b… Show more

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Cited by 27 publications
(6 citation statements)
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“…Micro-Electro-Mechanical-Systems (MEMS) sensors are promising candidates for the detection and measurement of several chemical/biological entities [16,[49][50][51]. Due to their ultra-small size, MEMS devices offer the potential to precisely detect and quantify the size and number of particles (concentration) in a media (air and fluids).…”
Section: Mems Sensorsmentioning
confidence: 99%
“…Micro-Electro-Mechanical-Systems (MEMS) sensors are promising candidates for the detection and measurement of several chemical/biological entities [16,[49][50][51]. Due to their ultra-small size, MEMS devices offer the potential to precisely detect and quantify the size and number of particles (concentration) in a media (air and fluids).…”
Section: Mems Sensorsmentioning
confidence: 99%
“…The technology that use the CMOS process to make MEMS devices is called CMOS-MEMS [28][29][30][31][32]. In this study, we employed the CMOS-MEMS technology to produce a MF microsensor.…”
Section: Introductionmentioning
confidence: 99%
“…CMOS-MEMS oscillators for timing applications present impressive performance [5] and have already met mobile phone reference clock demands [6]. Also, MEMS resonators constitute excellent sensors transducing chemical/physical magnitudes to frequency changes [7], [8] for a straightforward readout that, when coupled to a supporting amplifier, provides self-sustained oscillation operation for real-time frequency tracking with quasi-digital output [9]. In this line, technological trends in MEMS resonators are driven by: (i) nanoscale miniaturization seeking for extremely high sensitivity with challenging electromechanical transduction [10], and (ii) monolithic SoC integration requiring a transduction mechanism integrated on-chip [11].…”
Section: Introductionmentioning
confidence: 99%