CMUT-based resonant gas sensor array for VOC detection with low operating voltage

Park, Sangjun; Yoon, Inug; Lee, Sung‐Woo; Kim, Hyojung; Seo, Jiwon; Chung, Yoonyoung; Unger, Alexander; Kupnik, Mario; Lee, Hyunjoo Jenny

doi:10.1016/j.snb.2018.07.043

Cited by 54 publications

(25 citation statements)

References 30 publications

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“…therapeutic effects of ultrasound neuromodulation on various disease models, it is important to develop an ultrasound neuromodulation system that supports freely-moving experiments. Moreover, such miniaturized neuromodulation tools could also facilitate the investigation of the biological mechanism of ultrasound neuromodulation [3,[17][18][19][20][21][22][23][24]. Here, we propose a light-weight capacitive micromachined ultrasonic transducer (CMUT) ring array suitable for non-invasive brain stimulation for chronic experiments.…”

Section: Introductionmentioning

confidence: 99%

Miniature ultrasound ring array transducers for transcranial ultrasound neuromodulation of freely-moving small animals

Kim

Sim

et al. 2019

Brain Stimulation

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Section: Introductionmentioning

confidence: 99%

Miniature ultrasound ring array transducers for transcranial ultrasound neuromodulation of freely-moving small animals

Kim

Sim

et al. 2019

Brain Stimulation

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“…As selectivity is a critical component for sensory performances, the sensing material cross-sensitivity can be addressed by using advanced microfabrication technology, wherein, individual CMUT cells can be configured in an array format [30]. In order to use CMUT configuration as a gas sensor, the top membrane can be coated by a polymer using different techniques including spin coating, inkjet dispensing, dip coating, inkjet printing, layer-by-layer deposition and electrodeposition [16,[31][32][33][34][35].…”

Section: Cmut Functionalization With Sensing Materials and Device Sensmentioning

confidence: 99%

“…VOCs such as toluene, acetone, ethanol and methanol can be detected using a CMUT-based resonant sensor array using polymers such as poly(styrene-co-allyl alcohol), poly(ethylene oxide) and poly(isobutylene) as gas-sensitive coatings [30,39]. In the case of toluene detection, the CMUT sensors had a mass sensitivity of 0.8 Hz/fg and a chemical sensitivity of 1.5 Hz/ppm.…”

Section: Cmut Functionalization With Sensing Materials and Device Sensmentioning

confidence: 99%

“…In the case of toluene detection, the CMUT sensors had a mass sensitivity of 0.8 Hz/fg and a chemical sensitivity of 1.5 Hz/ppm. These sensitivities translate to a mass change of 4.4 pg upon exposure to the highest explored toluene concentration during sensing [30]. CO 2 and SO 2 can be sensed using a 16 MHz CMUT sensor functionalized using spin coating with methylated poly(ethylene imine) [38].…”

Section: Cmut Functionalization With Sensing Materials and Device Sensmentioning

confidence: 99%

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Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT

Nazemi

Balasingam

Swaminathan

et al. 2020

Sensors

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Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in developing micromachined mass sensors based on capacitive and piezoelectric transducer configurations for use in low concentration level gas detection in a complex environment. These micromachined sensors operate based on a shift in their center resonant frequencies. This shift is caused by a change in the sensor’s effective mass when exposed to the target gas molecules, which is then correlated to the gas concentration level. In this work, capacitive and piezoelectric-based micromachined sensors are investigated and their principle of operation, device structures and configurations, critical design parameters and their candidate fabrication techniques are discussed in detail.

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“…Capacitive Micromachined Ultrasonic Transducer (CMUT) is a promising ultrasonic transducer [1] and has been widely applied in medical imaging [2,3], nondestructive measurement [4], chemical sensing [5], and photoacoustic tomography [6]. CMUT is an electronic transducer based on micro-electro-mechanical system (MEMS) technology so that it owns intrinsic advantages, such as compatible process with integrated circuits, wide bandwidth, and excellent stability of electrical and thermal.…”

Section: Introductionmentioning

confidence: 99%

Experimental Characterization of an Embossed Capacitive Micromachined Ultrasonic Transducer Cell

Wang

Liu

et al. 2020

Micromachines

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Capacitive Micromachined Ultrasonic Transducer (CMUT) is a promising ultrasonic transducer in medical diagnosis and therapeutic applications that demand a high output pressure. The concept of a CMUT with an annular embossed pattern on a membrane working in collapse mode is proposed to further improve the output pressure. To evaluate the performance of an embossed CMUT cell, both the embossed and uniform membrane CMUT cells were fabricated in the same die with a customized six-mask sacrificial release process. An annular nickel pattern with the dimension of 3 μ m × 2 μ m (width × height) was formed on a full top electrode CMUT to realize an embossed CMUT cell. Experimental characterization was carried out with optical, electrical, and acoustic instruments on the embossed and uniform CMUT cells. The embossed CMUT cell achieved 27.1% improvement of output pressure in comparison to the uniform CMUT cell biased at 170 V voltage. The fractional bandwidths of the embossed and uniform CMUT cells were 52.5% and 41.8%, respectively. It substantiated that the embossed pattern should be placed at the vibrating center of the membrane for achieving a higher output pressure. The experimental characterization indicated that the embossed CMUT cell has better operational performance than the uniform CMUT cell in collapse region.

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CMUT-based resonant gas sensor array for VOC detection with low operating voltage

Cited by 54 publications

References 30 publications

Miniature ultrasound ring array transducers for transcranial ultrasound neuromodulation of freely-moving small animals

Miniature ultrasound ring array transducers for transcranial ultrasound neuromodulation of freely-moving small animals

Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT

Experimental Characterization of an Embossed Capacitive Micromachined Ultrasonic Transducer Cell

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