CO and CO2 thin-film SnO2 gas sensors on Si substrates

Hoefer, Ulrich; Kühner, Gerd; Schweizer, Werner; Sulz, Gerd; Steiner, Klaus

doi:10.1016/0925-4005(94)87009-8

Cited by 61 publications

(14 citation statements)

References 11 publications

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“…Hoefer et al [56] reported the development of a sensor film based on SnO 2 . The sensor showed a marked response at a concentration range of 1,000–10,000 ppm range at 270 °C.…”

Section: Carbon Dioxide Sensorsmentioning

confidence: 99%

Metal Oxide Semi-Conductor Gas Sensors in Environmental Monitoring

Fine

Cavanagh

Afonja

et al. 2010

Sensors

1,297

660

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Metal oxide semiconductor gas sensors are utilised in a variety of different roles and industries. They are relatively inexpensive compared to other sensing technologies, robust, lightweight, long lasting and benefit from high material sensitivity and quick response times. They have been used extensively to measure and monitor trace amounts of environmentally important gases such as carbon monoxide and nitrogen dioxide. In this review the nature of the gas response and how it is fundamentally linked to surface structure is explored. Synthetic routes to metal oxide semiconductor gas sensors are also discussed and related to their affect on surface structure. An overview of important contributions and recent advances are discussed for the use of metal oxide semiconductor sensors for the detection of a variety of gases—CO, NOx, NH3 and the particularly challenging case of CO2. Finally a description of recent advances in work completed at University College London is presented including the use of selective zeolites layers, new perovskite type materials and an innovative chemical vapour deposition approach to film deposition.

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“…Hoefer et al [56] reported the development of a sensor film based on SnO 2 . The sensor showed a marked response at a concentration range of 1,000–10,000 ppm range at 270 °C.…”

Section: Carbon Dioxide Sensorsmentioning

confidence: 99%

Metal Oxide Semi-Conductor Gas Sensors in Environmental Monitoring

Fine

Cavanagh

Afonja

et al. 2010

Sensors

1,297

660

View full text Add to dashboard Cite

show abstract

“…In order to improve the adhesion to the substrate, a glue layer of Cr, Ti, or W is formed between the electrode and the substrate. For good adhesion, Hoefer et al [110] used Ta, whereas Michel et al [111] used TiN as the glue layer. Sozza et al [112] also reported that the Ti/Pt layer can prevent the rather fast degradation as compared to the Ti/Au layer or the Ti/Pd/Au layer.…”

Section: Electrode Materials For Semiconductor Gas Sensorsmentioning

confidence: 99%

Electrodes for Semiconductor Gas Sensors

Lee

2017

Sensors

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The electrodes of semiconductor gas sensors are important in characterizing sensors based on their sensitivity, selectivity, reversibility, response time, and long-term stability. The types and materials of electrodes used for semiconductor gas sensors are analyzed. In addition, the effect of interfacial zones and surface states of electrode–semiconductor interfaces on their characteristics is studied. This study describes that the gas interaction mechanism of the electrode–semiconductor interfaces should take into account the interfacial zone, surface states, image force, and tunneling effect.

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“…These sensors can detect gases by their conductance changes due to carriers shifted between sensor bodies and gas molecules. Many studies [1][2][3][4][5][6][7][8] have been conducted to achieve a high sensitivity and/or good selectivity of gases, by use of catalytic effects or by controlling microstructures of SnO 2 sintered bodies or thin films. However, only a few 9-11 attempts have been made to use an effect of electric field for improving sensitivity or gas selectivity.…”

Section: Yoshiko Niki Kunishima and Masaru Miyayamamentioning

confidence: 99%

Effects of the external electric field from a substrate on Cl2 gas adsorption on SnO2 thin films

Kunishima

Miyayama

Yanagida

1996

Applied Physics Letters

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Articles you may be interested inThe effect of high-resistance SnO 2 on CdS/CdTe device performance AIP Conf. Proc. 462, 230 (1999); 10.1063/1.57900 Dependence of sensitivity of SnO x thinfilm gas sensors on vacancy defectsA study of electrical and optical properties of sputtered SnO2WO3 thin films AIP Conf.Electrical and optical properties of doped tin and zinc oxide thin films by atmospheric pressure chemical vapor deposition AIP Conf.

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CO and CO2 thin-film SnO2 gas sensors on Si substrates

Cited by 61 publications

References 11 publications

Metal Oxide Semi-Conductor Gas Sensors in Environmental Monitoring

Metal Oxide Semi-Conductor Gas Sensors in Environmental Monitoring

Electrodes for Semiconductor Gas Sensors

Effects of the external electric field from a substrate on Cl2 gas adsorption on SnO2 thin films

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