The thickness dependence of the structure of ultrathin Co films grown on Ge(111), using molecular beam epitaxy at room temperature, was studied via low energy-electron diffraction (LEED) and x-ray photoelectron diffraction. Cobalt deposition led to a surface phase transition from a c(2 × 8) reconstruction to a (1 × 1) structure. The (1 × 1) LEED pattern was gradually degraded with increased Co coverages, implying partial loss of long-range order. Experimental and theoretical XPED studies revealed that 0.7 and 1.5 ML Co deposition resulted in the formation of a reacted surface layer mostly composed of a partly ordered orthorhombic CoGe 2 phase, whereas 5 and 10 ML deposition resulted not only in this surface phase but also in the formation of a partly ordered bcc Co metal on top. The formation mechanism of these structures in the ultrathin Co/Ge(111) films was elucidated in the light of the Effective Heat of Formation model and lattice mismatch.