We experimentally investigate chemical erosion of polycrystalline graphite targets coated with boron-doped diamond (BDD) using an induction plasma containing low-energy, high-atomic-hydrogen flux. Chemical erosion is drastically suppressed by diamond coating the graphite target. The chemical sputtering yield for the BDD layer is about two orders of magnitude lower than that for the graphite target. After exposure in low-temperature hydrogen plasmas, however, the surface morphology of the BDD target is significantly modified. The polycrystalline diamond is eroded near the grain boundary, and many pits with diamond-like shapes are observed on the crystal surface. X-ray photoelectron spectroscopy and Raman spectroscopy reveal that the hydrogen atoms penetrate into the BDD target to a depth of at least ∼20 nm. In using graphite materials as plasma-facing components (PFCs) in fusion devices such as divertor tiles, it is recognized that the high chemical erosion rate due to the presence of hydrogen fuel and the related carbon dust formation will cause severe performance degradation in future fusion reactors. Diamond, which is a typical carbon crystal and has an sp 3 electronic structure, offers several features including an extremely high thermal conductivity, a low chemical reactivity, [1] and an increase of electrical conductivity that is possible through boron doping, making it superior for use as a PFC in fusion reactors. To date, several experimental efforts have focused on diamond erosion by energetic-ion irradiation [2, 3], but little effort has been devoted to low-energy atomic hydrogen. In the present research, boron-doped diamond (BDD) is tested for erosion by low-temperature (∼1 eV), high-flux hydrogen neutrals to check its suitability for divertor tiles used in a detached divertor.The experiments were performed in an Ar/H 2 mixture plasma generated by an inductively coupled plasma (ICP), which has the characteristic features of high neutral particle flux Γ H ∼ 10 23 -10 24 m −2 · s −1 , low ion flux Γ i ∼ 10 19 -10 20 m −2 · s −1 , and low electron temperature T e ∼ 1 eV [4]. The working gas pressure is ∼4 kPa. An approximately 30-nm thick polycrystalline BDD layer covers an isotropic graphite, where the boron doping rate is ∼0.5%. We deposit a BDD coating on an isotropic graphite target using hot-filament chemical vapor deposition (CVD). We vary irradiation time from 60 to 1200 minutes to examine the author's e-mail: 1027take@ee.t.kanazawa-u.ac.jp effect of target erosion due to hydrogen fluence into the target. The surface temperature is measured thorough a quartz window using a radiation thermometer. Figure 1 shows the weight loss of the BDD and the graphite targets as a function of atomic hydrogen fluence. Here, atomic hydrogen fluence is estimated using the results of an electromagnetic fluid simulation under local thermodynamic equilibrium conditions [5]. The erosion of both the graphite and the BDD target increases linearly with increasing hydrogen fluence. The chemical sputtering yield (Y) is estim...