CO2 laser microprocessing for laser damage growth mitigation of fused silica optics

Doualle, Thomas; Gallais, Laurent; Monneret, Serge; Bouillet, Stéphane; Bourgeade, Antoine; Ameil, Christel; Lamaignère, Laurent; Cormont, Philippe

doi:10.1117/1.oe.56.1.011022

Cited by 26 publications

(9 citation statements)

References 39 publications

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“…The intensifications diffracted by three particular defects are now investigated experimentally. Defect 1 ensues from pollution by a drop of solvent, defect 2 is an AR bump caused by a particle on the substrate during AR coating deposition, while defect 3 is the mitigation of a laserinduced damage site made by using a CO 2 laser [7] 034008-7 (Defects 1 and 2 are coating defects, AR layer with refraction index: n AR = 1.22; the phase shifts will be defined by φ i = k 0 h i (n AR − 1) where h i are mechanical heights.). The intensifications by these three defects are measured using a setup which probes the diffracted intensity [11].…”

Section: Comparison With Experimental Resultsmentioning

confidence: 99%

“…Diffraction patterns caused by the defects yield local high-field intensities that increase the probability of laser-induced damage [5]. Defects can occur from polishing processes [6], antireflective (AR) coating deposition, laser-induced damage mitigation [7], optics handling, contamination [8], or just from the interaction between light and the optical components [9].…”

Section: Introductionmentioning

confidence: 99%

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Strong Light Intensifications Yielded by Arbitrary Defects: Fresnel Diffraction Theory Applied to a Set of Opaque Disks

et al. 2019

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Two centuries ago, Fresnel, Poisson, and Arago showed how the wave nature of light induces a bright spot behind an opaque disk. We develop an analytical model based on the Fresnel diffraction theory to show how small perturbations such as digs or scratches can yield intense light enhancements on the downstream axis. The impact of defects with complex morphology on light diffraction is shown to be accurately modeled by the Fresnel theory applied to a set of opaque disks characterized by phase shift and transmittance. This model can be used either to define the geometry of the defects that optimizes the light enhancement or to improve the defect specification on the surface of the optical components. We explain why partial information of the defect morphology can suffice to specify a safety distance beyond which light intensifications are not dangerous. The validity of this analytical approach is studied by measuring the intensifications created by three different microdefects.

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Section: Comparison With Experimental Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Strong Light Intensifications Yielded by Arbitrary Defects: Fresnel Diffraction Theory Applied to a Set of Opaque Disks

et al. 2019

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“…The experimental system that has been used in this work has been described in details in Ref. 16 . We will only briefly indicate the main specifications of interest for the present work.…”

Section: Experiments a Experimental Systemmentioning

confidence: 99%

“…CO 2 laser processing of glass has been used for decades, but it is still a very active field of research to develop innovative processes. Recent interests include for instance optics manufacturing [1][2][3][4] , surface micromachining [5][6][7][8] , to produce refractive or diffractive optical elements, processing of optical fibers [9][10][11][12][13] , including end-facet, fiber or cladding processing, or mitigation of surface damage in high power laser components [14][15][16][17][18] , such as laser damage or scratches. The CO 2 laser-material interaction is particularly suitable for thermal treatments and processing of fused silica because this glass has a high thermal shock resistance due to a low thermal expansion coefficient 19 .…”

Section: Introductionmentioning

confidence: 99%

Experimental and numerical investigation of CO2 laser ablation of fused silica with sub-microsecond pulses

Quintal

Cormont

Gallais

2021

Journal of Applied Physics

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The CO2 laser material interaction is commonly used for thermal treatments and processing of fused silica glasses. As the laser pulse duration decreases down to a few tens of microseconds, the heat-affected depth in the material decreases up to the point where it has the same magnitude as the laser radiation penetration depth, which is an interesting operating point for applications that require minimal heat-affected zone. In this work, we explore the effects of CO2 laser pulses in the range of 100 μs to a few milliseconds on the laser ablation of polished fused silica surfaces, based on experiments and numerical simulations. We particularly study the evolution of surface profile as a function of the number of applied pulses. The results suggest that the ablation depth can be accurately controlled from a few hundreds of nanometers to a few tens of micrometers by adjusting the combination of the number of applied pulses and pulse duration.

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“…Monitoring laser damage growth on vacuum windows is essential to control the quality of laser beams and to limit the operating costs using optics mitigation [17,18,19]. Thus, observation systems have been developed to track laser damage sites without removing fused silica components after each laser shot.…”

Section: Introductionmentioning

confidence: 99%

Detection and tracking of laser damage sites on fused silica components by digital image correlation

Hallo

Lacombe

Néauport

et al. 2021

Optics and Lasers in Engineering

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HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

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CO2 laser microprocessing for laser damage growth mitigation of fused silica optics

Abstract: International audienc

Cited by 26 publications

References 39 publications

Strong Light Intensifications Yielded by Arbitrary Defects: Fresnel Diffraction Theory Applied to a Set of Opaque Disks

Strong Light Intensifications Yielded by Arbitrary Defects: Fresnel Diffraction Theory Applied to a Set of Opaque Disks

Experimental and numerical investigation of CO2 laser ablation of fused silica with sub-microsecond pulses

Detection and tracking of laser damage sites on fused silica components by digital image correlation

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