2013
DOI: 10.1080/10420150.2013.792813
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Coating stainless steel with diamond-like carbon using the hot filament chemical vapor deposition system, and its effects on fusion devices

Abstract: 2013) Coating stainless steel with diamond-like carbon using the hot filament chemical vapor deposition system, and its effects on fusion devices, Radiation Effects Internal mirrors are used widely for plasma diagnostics in fusion devices. Therefore, keeping them in good optical condition is essential. The results of this experiment show that coating stainless steel 316l (S.S.316l) mirrors with diamond-like carbon (DLC) reduces the erosion rate and contamination of plasma by evaporation and sputtering and also… Show more

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Cited by 3 publications
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“…into carbon atoms through chemical reactions and deposits them on a substrate to form a thin film. According to different reaction conditions, CVD methods can be divided into various types, such as hot-filament chemical vapor deposition (HFCVD) [8], plasma-enhanced chemical vapor deposition (PECVD) [9], and so on. The advantages of chemical vapor deposition methods in preparing DLC thin films can be summarized as follows: the active particles in the plasma (such as ions, electrons, and free radicals) can significantly increase the reaction rate, thereby accelerating the deposition rate of the thin film; DLC thin films prepared by RF-PECVD have advantages such as a smooth surface, high hardness, and structure similar to that of diamonds.…”
Section: Introductionmentioning
confidence: 99%
“…into carbon atoms through chemical reactions and deposits them on a substrate to form a thin film. According to different reaction conditions, CVD methods can be divided into various types, such as hot-filament chemical vapor deposition (HFCVD) [8], plasma-enhanced chemical vapor deposition (PECVD) [9], and so on. The advantages of chemical vapor deposition methods in preparing DLC thin films can be summarized as follows: the active particles in the plasma (such as ions, electrons, and free radicals) can significantly increase the reaction rate, thereby accelerating the deposition rate of the thin film; DLC thin films prepared by RF-PECVD have advantages such as a smooth surface, high hardness, and structure similar to that of diamonds.…”
Section: Introductionmentioning
confidence: 99%