Coaxial twin-shaft magnetic fluid seals applied in vacuum wafer-handling robot

Cong, Ming; Wen, Haiying; Du, Yu; Dai, Penglei

doi:10.3901/cjme.2012.04.706

Cited by 23 publications

(11 citation statements)

References 9 publications

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“…Accordingly, the controllability of robots in vacuum conditions is of high importance. In the case of vacuum robots for microelectronics, the most widely used are magnetic transmission technology or coaxial twin-shaft magnetic fluid seals applied in vacuum waferhandling robots [13]. Operation stability at the macroscales is achieved by controlling the magnetic field since magnetic switching for microrobotics is a much more difficult task.…”

Section: Introductionmentioning

confidence: 99%

Towards Electron-Beam-Driven Soft / Polymer Fiber Microrobotics for Vacuum Conditions

Градов

2022

Materials Research Proceedings

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Abstract. The possibility of creating vacuum robotics based on the polymer structures irradiated by an electron beam, in particular, polymer fibers, which provide high functional flexibility and a variety of states, is discussed. The possibility of using polymer fibers as different types of MEMS-like electromechanical elements is demonstrated - from elastic cantilevers to springs that change their state under the electron beam. Experimentally proved the presence of different functional types of fibers, correlating with their thickness, as well as the phenomenon of the fiber break. A number of exotic forms of dynamics have been demonstrated and a method for their detection has been developed using 2D Fourier spectra, integral spatial characteristics, time resolved correlograms and wavelet transforms (visualized as the scaleograms / scalograms). Access barcodes for the full video records of the corresponding experiments are provided.

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Section: Introductionmentioning

confidence: 99%

Towards Electron-Beam-Driven Soft / Polymer Fiber Microrobotics for Vacuum Conditions

Градов

2022

Materials Research Proceedings

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“…As a new sealing method, the magnetic fluid seal has the advantages of zero leakage, long life, and no pollution [1][2][3][4]. And it has been widely used in aerospace, medical equipment, chemical machinery, and other fields [5][6][7][8][9][10][11]. The sealing principle is that the permanent magnet, pole shoes, and rotation shaft constitute the magnetic circuit, and a magnetic field intensity difference is formed at the sealing gap between the pole teeth and the shaft.…”

Section: Introductionmentioning

confidence: 99%

Effect of Permanent Magnet Material on Failure-Pressure of Magnetic Fluid Seal

Zhang

2021

Preprint

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Material properties of permanent magnet in the magnetic fluid seal are important factors that determine the sealing effect. However, the relationship between the magnetic properties of permanent magnet and the failure-pressure has not been studied quantitatively in the available research. In this work, the relationship between material properties of permanent magnet and the failure-pressure of magnetic fluid seal was obtained from theoretical analysis and numerical simulation. The permanent magnet was changed in materials to calculate the failure-pressures of a typical magnetic fluid seal. The result shows that the failure-pressure of magnetic fluid seal grows with the maximum magnetic energy product of permanent magnet increases at the beginning, whereas there is a turning point. After that, the failure-pressure decreases as the maximum magnetic energy product increases.

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Section: Introductionmentioning

confidence: 99%

Effect of permanent magnet material on failure-pressure of magnetic fluid seal

Zhang

2021

SN Appl. Sci.

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Material properties of permanent magnet in the magnetic fluid seal are important factors that determine the sealing effect. However, the relationship between the magnetic properties of permanent magnet and the failure-pressure has not been studied quantitatively in the available research. In this work, the relationship between material properties of permanent magnet and the failure-pressure of magnetic fluid seal was obtained from theoretical analysis and numerical simulation. The permanent magnet was changed in materials to calculate the failure-pressures of a typical magnetic fluid seal. The results show that the failure pressure of the magnetic fluid seal increases with the increase of the maximum magnetic energy product of the permanent magnet, but there is a turning point. After that, the failure-pressure decreases as the maximum magnetic energy product increases.

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Coaxial twin-shaft magnetic fluid seals applied in vacuum wafer-handling robot

Cited by 23 publications

References 9 publications

Towards Electron-Beam-Driven Soft / Polymer Fiber Microrobotics for Vacuum Conditions

Towards Electron-Beam-Driven Soft / Polymer Fiber Microrobotics for Vacuum Conditions

Effect of Permanent Magnet Material on Failure-Pressure of Magnetic Fluid Seal

Effect of permanent magnet material on failure-pressure of magnetic fluid seal

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