“…The deposition of energetic ions fragments the clusters, leads to inverse Ostwald ripening [9], and ultimately limits cluster sizes. The basic understanding of IBS has been exploited to fabricate interesting nanostructures [9][10][11][12][13][14][15] and alter cluster size distributions [15,16]. But unlike low dose semiconductor doping via implantation that is extensively studied and understood [17][18][19][20], no detailed, comprehensive, quantitative theory if IBS has been developed.…”