“…1. In RBS, the amount of each element is given as areal density [atoms/cm 2 ], hence the layer thickness was determined by calculating from the areal density of each element and theoretical density of each pure material (Be: 1.8 g/cm 3 , C: 2.2 g/cm 3 , W: 19.3 g/cm 3 ). The C layer on Be sample annealed at 773K developed to a resulting mixed layer with a Be/C ratio of 2:1, which indicated the formation of a Be 2 C phase.…”