2018
DOI: 10.1088/1757-899x/387/1/012071
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Coefficient of friction of titanium oxynitride films deposited by hot target reactive sputtering

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Cited by 2 publications
(1 citation statement)
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“…The wear resistance of ceramics was determined using a scanning nanohardness tester (NanoScan-3D). A piezo resonant sensor-cantilever of a tuning fork design with a higher bending stiffness of the cantilever is a sensitive element of the device on which the test tip is installed [11,12]. The study used a diamond tip in a trihedral pyramid of the Berkovich type (the angle between the height and the adjacent face is 65°).…”
Section: Methodsmentioning
confidence: 99%
“…The wear resistance of ceramics was determined using a scanning nanohardness tester (NanoScan-3D). A piezo resonant sensor-cantilever of a tuning fork design with a higher bending stiffness of the cantilever is a sensitive element of the device on which the test tip is installed [11,12]. The study used a diamond tip in a trihedral pyramid of the Berkovich type (the angle between the height and the adjacent face is 65°).…”
Section: Methodsmentioning
confidence: 99%