Coherent Diffractive Imaging with a Laboratory-Scale, Gas-Discharge Plasma Extreme Ultraviolet Light Source

Abstract

Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high resolution microscopy and have been widely used in the extreme ultraviolet (EUV) and X-ray communities. In this experiment, we demonstrate CDI using a compact gas-discharge EUV light source with a wavelength of 17.3 nm (oxygen VI emission). Our image reconstruction method accounts for the partial spatial coherence of the radiation using a deconvolution technique. Our results are promising for future laboratory-scale CDI applications, including mask inspection for EUV lithography and EUV metrolog