Coherent growth and superhardness effect of AlN/TiN nanomultilayers

Mei, Fanghua; Shao, Nan; Dai, Jichun; Li, G.Y.

doi:10.1016/j.matlet.2004.07.005

Cited by 28 publications

(6 citation statements)

References 18 publications

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“…In order to evaluate the SPP at interfaces involving TiN as a conductor, we initially consider the TiN/AlN interface. We base this choice upon the structural and chemical compatibility of the conducting fcc B1-TiN(111) and the dielectric hcp w-AlN(0001) (note that the fundamental gap of AlN is 6.2 eV [ 146 ]) surfaces that result in stable and sharp TiN/AlN interfaces [ 147 , 148 , 149 , 150 , 151 , 152 , 153 ]. The most characteristic description of the SPP across the interface is via the dispersion relation that correlates the frequency of light ω with the wave vector k x in the direction of propagation of SPP.…”

Section: Resultsmentioning

confidence: 99%

“…In addition, Figure 7 demonstrates the SPP dispersion relations at TiN/Dielectric interfaces for various popular dielectrics and for a highly conductive, low-loss TiN film. Air can hardly sustain a SPP mode, while the SPP is stronger and gets bigger extreme k x values with increasing the dielectric constant of the dielectric material; of special importance is the exceptional SPP performance across the TiN/AlN and TiN/GaN interfaces which are exceptionally stable and sharp [ 18 , 147 , 148 , 149 , 150 , 151 , 152 , 153 ]. Note, however, that SPP-based devices using the TiN/GaN interface are limited to a photon energy range below 3.45 eV, which is the direct fundamental gap of GaN.…”

Section: Resultsmentioning

confidence: 99%

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Optical Properties and Plasmonic Performance of Titanium Nitride

2015

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Titanium nitride (TiN) is one of the most well-established engineering materials nowadays. TiN can overcome most of the drawbacks of palsmonic metals due to its high electron conductivity and mobility, high melting point and due to the compatibility of its growth with Complementary Metal Oxide Semiconductor (CMOS) technology. In this work, we review the dielectric function spectra of TiN and we evaluate the plasmonic performance of TiN by calculating (i) the Surface Plasmon Polariton (SPP) dispersion relations and (ii) the Localized Surface Plasmon Resonance (LSPR) band of TiN nanoparticles, and we demonstrate a significant plasmonic performance of TiN.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Optical Properties and Plasmonic Performance of Titanium Nitride

2015

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“…Since these pioneering works large efforts to understand the stabilization effect [10,87,88] and to further optimize the TiN/AlN superlattice architecture and properties [89][90][91] have been made until today. It is state-of-the-art knowledge that a superlattice effect (i.e.…”

Section: Stabilization Effects In Nitride Multilayer Systemsmentioning

confidence: 99%

Concepts for the design of advanced nanoscale PVD multilayer protective thin films

Stueber

Holleck

Leiste

et al. 2009

Journal of Alloys and Compounds

281

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“…Furthermore, SL architecture can enable formation of metastable phases, otherwise rather uneasy to synthesise experimentally. The application higly relevant cubic AlN, for instance, was shown to be epitaxially stabilised in AlN/CrN 6,7 or AlN/TiN [8][9][10] SLs.…”

Section: Introductionmentioning

confidence: 99%

Point-defect engineering of MoN/TaN superlattice films: A first-principles and experimental study

et al. 2020

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Superlattice architecture represents an effective strategy to improve performance of hard protective coatings. Our model system, MoN/TaN, combines materials well-known for their high ductility as well as a strong driving force for vacancies. In this work, we reveal and interpret peculiar structure-stability-elasticity relations for MoN/TaN combining modelling and experimental approaches. Chemistry of the most stable structural variants depending on various deposition conditions is predicted by Density Functional Theory calculations using the concept of chemical potential. Importantly, no stability region exists for the defect-free superlattice. The X-ray Diffraction and Energy-dispersive X-ray Spectroscopy experiments show that MoN/TaN superlattices consist of distorted fcc building blocks and contain non-metallic vacancies in MoN layers, which perfectly agrees with our theoretical model for these particular deposition conditions. The vibrational spectra analysis together with the close overlap between the experimental indentation modulus and the calculated Young's modulus points towards MoN0.5/TaN as the most likely chemistry of our coatings. arXiv:1905.04155v1 [cond-mat.mtrl-sci]

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Coherent growth and superhardness effect of AlN/TiN nanomultilayers

Cited by 28 publications

References 18 publications

Optical Properties and Plasmonic Performance of Titanium Nitride

Optical Properties and Plasmonic Performance of Titanium Nitride

Concepts for the design of advanced nanoscale PVD multilayer protective thin films

Point-defect engineering of MoN/TaN superlattice films: A first-principles and experimental study

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