To investigate the thermal evolution of vacancy-type defects in He-ion irradiated W and W5Re alloy, different isochronal annealing treatments from 373 to 1273 K were conducted on the irradiated materials. Positron annihilation spectroscopy including positron annihilation lifetime spectroscopy and Doppler broadening spectroscopy were mainly used to characterize the micro-defects evolution. The results showed that the thermal evolution characteristics of defects in both W and W5Re were similar. After He-ion irradiation, mono-vacancies with positron annihilation lifetime of ~ 190 ps were detected in W, together with a large amount of dislocation loops with positron annihilation lifetime of ~ 150 ps in W5Re alloys. The coarsening of vacancy clusters at the expense of small vacancy clusters was the main thermal evolution feature of vacancy-type defects in both W and W5Re when annealing temperature increased to 1073 K. In this progress, the positron annihilation lifetime increased to ~ 350 ps (clusters composed of 4 –8 mono-vacancies) in both W and W5Re. As the temperature increased to 1273 K, the positron annihilation lifetime decreased to ~ 240 ps, which was attributed to a significant population reduction of the dislocation loops, the dissociation of large HenVm complexes and the annealing of micro-voids in both W and W5Re. The vacancy-type defects in W5Re were more susceptible to the annealing temperature because of the formation of vacancy cluster-Re complexes. Re clusters in irradiated W5Re alloy could serve as the nucleation sites of He bubbles, which promoted the swelling and protrusion formation on the surface.