Cold chemical lamination of ceramic green tapes

Overview on fabrication of three-dimensional structures in multi-layer ceramic substrate

“…Solvents, such as DuPont thinners and plasticizer butyl benzyl phthalte, can also be employed to bond LTCC tapes at atmospheric pressure. 34,52 The fabrication of square embedded cavities with widths of 2, 5, and 10 mm has been explored using this technique. An embedded cavity with an area of 6 mm × 1.8 mm has been fabricated by bonding an embossed LTCC laminate to another, unpatterned, LTCC laminate at low lamination pressure using a mixture of polypropylene-glycol (PPG) and ethanol (see Fig.…”

“…20(a)). 52 The use of overly low lamination pressures (i.e. below 10 MPa) has also been reported to cause delamination.…”

Integration of transparent glass window with LTCC technology for μTAS application

“…10 The cold chemical lamination (CCL) was applied. 11 A DuPont 4553 thinner acted as a solvent to a green tape sheet in the CCL process.…”

Fabrication of membranes and microchannels in low-temperature co-fired ceramic (LTCC) substrate using novel water-based sacrificial carbon pastes

“…The corresponding high applied pressures and temperatures during these steps may cause deformation of the fabricated spatial structures and precludes realization of structures with complex geometry inside LTCC multilayer modules. Several methods have been proposed to preserve the desired geometry of intricate micromechanical or microfluidic features [9][10][11][12], with the most common technique basing on various sacrificial volume materials (SVMs). Various types of substances can be used as an SVM, e.g.…”