Several thermal spray processes developed recently are characterized by relatively low temperature and higher velocity of sprayed particles. They include cold spray, high velocity oxy-fuel spray, and warm spray, in which majority or all the sprayed particles are in solid phase when impinging onto the substrate surface. Therefore, in order to understand the coating formation process of such processes, detailed knowledge concerning impact phenomena of a solid particle is essential. It is generally accepted that there exists a minimum velocity beyond which a particle adheres to the substrate and this velocity is called the ''critical velocity''. How the critical velocity depends on various materials and process variables is not fully understood yet. In this study, analysis of a metal particle impacting onto a metal substrate was carried out by using a dynamic finite element code (ABAQUS). Effects of a substrate and a particle temperature on the critical velocity were numerically studied. Also, effects of thermal conduction on the simulation results were discussed. It was found that critical velocity decreases with 1) higher stiffness of the substrate, 2) higher particles temperature, and 3) greater particle size.