Collinearity and stitching performance on an ASML stepper

Moosdijk, M.J.E. van de; Brink, Ennos Van den; Simon, Klaus; Friz, Alexander; Phillipps, Geoffrey N.; Travers, Richard J.; Raaymakers, Erik

doi:10.1117/12.472358

Cited by 7 publications

(6 citation statements)

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“…Therefore, the lower bound for x is the length (L i ) of the inner beam and the upper bound is obtained by trial and error such that the minimum value of the objective function falls within two bounds. The constrained optimization problem presented in (11) is solved using M AT LAB. The results of DPCM after optimization of parasitic error are discussed in Section IV-C later.…”

Section: Subjectedtomentioning

confidence: 99%

“…Thus, compliant mechanisms provide backlash-free and frictionfree smooth motion with precision, accuracy, repeatability, and reliability for many nano and microscale applications [2]- [8]. These mechanisms are used in applications such as microstereolithography [9], spontaneous fabrication of the 3D multiscale fractal structures [10], and semiconductor wafer inspection/production instrumentation [11], Micro-Electro-Mechanical Systems (MEMS) [12], Scanning Probe Microscopy (SPM) [13].…”

Section: Introductionmentioning

confidence: 99%

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Design and Analysis of Ultra-Precise Large Range Linear Motion Platforms Using Compliant Mechanism

Tanksale

Gandhi

2022

IEEE Access

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Double parallelogram compliant mechanism (DPCM) is extensively used to obtain precise straight-line motion. Symmetric DPCMs, used previously, traverse a straight-line path without parasitic error when gravity vector is perpendicular to the plane of bending of beams. However, when gravity vector is either in line with beams (orientation B) or in the plane of bending of beams (orientation C), asymmetry in the loading causes undesired deviation from a straight-line path. This undesired deviation called parasitic error increases, especially in beams with relatively low flexural rigidity required to obtain larger displacements with low power actuators. This paper first characterizes parasitic error, in such cases, using large deformation analysis and further proposes novel ways to minimize it. A recently developed, chained beam constraint method is used to model, characterize, and optimize DPCMs. Optimized parameters are further validated by FEA and experiments. In orientation B, after implementing the proposed method, numerical analysis and experimental results show that the undesired parasitic error of 123 µm is drastically reduced to 2 µm and 6 µm, respectively. Moreover, systematic design procedure with corresponding graphs is presented to avoid modeling and optimization steps for a user-specific case. The proposed methods pave pathways to reducing the parasitic error during large-range motion using multiple orientations of DPCMs and thus make DPCMs more employable in several precision motion applications such as 3D optical scanners, 3D micro-printers, CMM probes, and microscopy stages.

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Section: Subjectedtomentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design and Analysis of Ultra-Precise Large Range Linear Motion Platforms Using Compliant Mechanism

Tanksale

Gandhi

2022

IEEE Access

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“…The potential benefits of the planar parallel motion stages over serial manipulators are observed, such as lesser inertia parts, greater precision, larger workspace, and greater structural rigidity [9]. The above comparison outlines that parallel motion stages are more efficient than serial manipulators [10][11][12][13][14]. The most challenging aspect of micro-/nano manipulation is improving the design while considering numerous factors such as high stiffness, massive amplification, high-precision tracking [15], and accurate positioning.…”

Section: Introductionmentioning

confidence: 99%

Design development and control of a shape memory alloy linear actuation based XYθ motion stage

Choudhury

Singh

2023

Eng. Res. Express

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This article addresses the development and trajectory tracking analysis of the three degrees of freedom Shape memory alloy (SMA) actuation-based 4-PPR XYθ motion stage. The developed motion stage is of four legs of the PPR (Prismatic-Prismatic-Revolute) configuration, having the first prismatic joint as the active joint. SMA spring is incorporated as the linear actuator of the motion stage. The three degrees of freedom motion of the end-effector is achieved based on a new type of SMA-driven PPR joint configuration to provide two translations and one rotational motion. The advantages of the SMA as an actuator is such as lightweight, higher accuracy, and micron-level movement to establish linear motion and silent actuation. The kinematic and jacobian relations are derived for the developed motion stage. The actuation of the SMA (Nitinol) spring actuator is accomplished by the use of a programmable power supply. In addition, the close loop PID control scheme to the SMA linear actuator is investigated. The mechanism has some inherent errors, as geometric errors (kinematic error), friction between the elements of the mechanism, etc., are significant issues in tracking the trajectory of the motion stage. Thus, to address the above issues, this study incorporates the dual-loop control scheme for better trajectory tracking and error compensation of the proposed motion stage. The control method employs a redundant feedback approach, in which discrete joint space displacements and mobile platform coordinates, and task space coordinates are determined as feedback signal using suitable sensors. In this control scheme, the actual joint displacement errors are computed using the redundant feedback data and corrected the desired joint displacement trajectory to obtain the desired task space trajectory. To measure the effectiveness of the used control scheme, a real-time prototype of the proposed motion stage (4-PPR) is developed and investigated the performance of the control method using some simple geometric trajectories. It is observed from the experiments that the motion stage using SMA linear actuation technique has good tracking performance using the control scheme. The developed motion stage can be implemented in the micro-stereolithography process and micron-level positioning application.

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“…However, there is now a growing need for XY nanopositioning systems that can provide motion range of several millimeters while maintaining nanometric quality in a compact desktop-size package. Such applications include scanning probe microscopy and metrology [11][12][13][14][15], scanning probe nanolithography [16,17], memory storage [18], harddrive [19] and semiconductor inspection [20], semiconductor packaging [21], and biological imaging [22].…”

Section: Introductionmentioning

confidence: 99%

Design of a Large Range XY Nanopositioning System

Awtar¹,

Parmar

2013

Journal of Mechanisms and Robotics

125

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Achieving large motion range (>1 mm) along with nanometric motion quality (<10 nm) simultaneously has been a key challenge in nanopositioning systems. Practical limitations associated with the individual physical components (bearing, actuators, and sensors) and their integration, particularly in the case of multi-axis systems, have restricted the range of currently available nanopositioning systems to approximately 100 μm per axis. This paper presents a novel physical system layout, comprising a bearing, actuators, and sensors, that enables large range XY nanopositioning. The bearing is based on a parallel-kinematic XY flexure mechanism that provides a high degree of geometric decoupling between the two motion axes by avoiding geometric over-constraint, provides actuator isolation that allows the use of large-stroke single-axis actuators, and enables a complementary end-point sensing scheme using commonly available sensors. These attributes help achieve 10 mm × 10 mm motion range in the proposed nanopositioning system. Having overcome the physical system design challenges, a dynamic model of the proposed nanopositioning system is created and verified via system identification. In particular, dynamic nonlinearities associated with the large displacements of the flexure mechanism and resulting controls challenges are identified. The physical system is fabricated, assembled, and tested to validate its simultaneous large range and nanometric motion capabilities. Preliminary closed-loop test results, which highlight the potential as well as pending challenges associated with this new design configuration, are presented.

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Collinearity and stitching performance on an ASML stepper

Cited by 7 publications

References 0 publications

Design and Analysis of Ultra-Precise Large Range Linear Motion Platforms Using Compliant Mechanism

Design and Analysis of Ultra-Precise Large Range Linear Motion Platforms Using Compliant Mechanism

Design development and control of a shape memory alloy linear actuation based XYθ motion stage

Design of a Large Range XY Nanopositioning System

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