Abstract-A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at the mechanical resonance frequency of 40 kHz provides an optical scan angle of 38.5• for the 1.4-mm-wide mirror. This scanner is a significant step toward achieving full-highdefinition resolution (1920 × 1080 pixels) in mobile laser projectors without the use of vacuum packaging. The reported piezoscanner requires no bulky components and consumes < 30-mW power at maximum deflection, thus providing significant power and size advantages, compared with reported electromagnetic and electrostatic scanners. Interferometry measurements show that the dynamic deformation is at acceptable levels for a large fraction of the mirror and can be improved further for diffraction-limited performance at full resolution. A design variation with a segmented electrode pair illustrated that reliable angle sensing can be achieved with PZT for closed-loop control of the scanner.[
2012-0116]Index Terms-High-frequency laser beam scanning, lead zirconate titanate (PZT) thin-film-actuated, microelectromechanical systems (MEMS), MEMS mirror, resonant scanner.