Combinatorial Pulsed Laser Deposition of Pentacene Films for Field Effect Devices

Abstract

Summary:Combinatorial pulsed laser deposition (PLD) technique has been applied to the fabrication of pentacene thin films for field effect devices. The pentacene films were fabricated by PLD with the Nd:YAG laser wavelength, fluence and the substrate temperature as combinatorial parameters. From the IR and UV‐vis absorption spectra and electrical properties of the films, the laser wavelength and fluence have been elucidated to be factors dominating the properties of the film.Schematic diagram of a combinatorial pulsed laser deposition (PLD) system.magnified imageSchematic diagram of a combinatorial pulsed laser deposition (PLD) system.

Polymer films filled with organic molecules by CO2 laser evaporation in vacuum

“…Thin film of organic semiconductors is new advanced research direction for creation functional layers for field effect transistors especially on flexible plastic substrate. Laser evaporation of organic semiconductor, in particular, pentacene seems promising method for production of these layers [11]. One new p-type organic semiconductor is 5,5 0 -di(9,9 0 -di-(butyl)-fluorene 0 )-2,2 0 -bithiophene (DBFBT) [12].…”

Patterned substrates fabricated by a controlled freezing approach and biocompatibility evaluation by stem cells

“…Aqueous solutions or suspensions are normally used although organic solutions have also been employed to fabricate porous hydrophobic materials. However, the controlled freezing method has rarely been used to fabricate surface patterned structures, which are commonly produced by other techniques [11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28].…”

“…The most commonly used approaches to fabricating surface patterned structures may be laser lithography [20] or photolithography [21][22][23]. The potential problems with photolithography are polymer degradation caused by photo-oxidation and lack of ability to form large-area low-cost high-resolution patterns [24].…”

Combinatorial Physical Vapor Deposition of π‐Conjugated Organic Thin Film Libraries

“…Pentacene‐based FET attracts special interest due to high carrier mobility, but there has been few report on combinatorial approach to pentacene films and FET. We fabricated pentacene films by the combinatorial pulsed laser deposition (PLD) method illustrated schematically in Figure 9 25. Parameters for optimization include the wavelength and power (fluence) of Nd/YAG laser, and substrate temperature.…”