2022
DOI: 10.5796/electrochemistry.22-00002
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Combinatorial Synthesis and Ionic Conductivity of Amorphous Oxynitrides in a Pseudo-ternary Li<sub>3</sub>PO<sub>4</sub>-Li<sub>4</sub>SiO<sub>4</sub>-LiAlO<sub>2</sub> System

Abstract: A combinatorial synthesis system consisting of co-sputtering multiple radio frequency (RF) cathodes was developed to investigate the presence of new amorphous solid electrolytes in a pseudoternary Li3PO4-Li4SiO4-LiAlO2 system. Oxynitride solid-electrolyte films were synthesized under an N2 atmosphere by reactive RF sputtering with cathodes made of different materials, such as Li3PO4, Li4SiO4, and LiAlO2 installed at different positions in the chamber. The formation of amorphous films with no grains and a co… Show more

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Cited by 2 publications
(2 citation statements)
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“…The Li 3 PO 4 layer was deposited using radio frequency sputtering (QAM-4ST, ULVAC, Chigasaki, Japan) to suppress the decomposition of LICGC in contact with Li. 36 The Li anode film was deposited on Li 3 PO 4 via thermal evaporation, 34 and a Cu film, as a current collector, was deposited on the Si electrode via thermal evaporation. The fabricating conditions of the Si, Li 3 PS 4 , Li 3 PO 4 , Li, and Cu films are described in Supporting Information (SI) S1.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The Li 3 PO 4 layer was deposited using radio frequency sputtering (QAM-4ST, ULVAC, Chigasaki, Japan) to suppress the decomposition of LICGC in contact with Li. 36 The Li anode film was deposited on Li 3 PO 4 via thermal evaporation, 34 and a Cu film, as a current collector, was deposited on the Si electrode via thermal evaporation. The fabricating conditions of the Si, Li 3 PS 4 , Li 3 PO 4 , Li, and Cu films are described in Supporting Information (SI) S1.…”
Section: Methodsmentioning
confidence: 99%
“…A thin-film battery consisting of Cu/Si/Li 3 PS 4 /LICGC/Li 3 PO 4 /Li was fabricated by depositing amorphous Li 3 PO 4 and Li films on the opposite sides of the LICGC substrate. The Li 3 PO 4 layer was deposited using radio frequency sputtering (QAM-4ST, ULVAC, Chigasaki, Japan) to suppress the decomposition of LICGC in contact with Li . The Li anode film was deposited on Li 3 PO 4 via thermal evaporation, and a Cu film, as a current collector, was deposited on the Si electrode via thermal evaporation.…”
Section: Methodsmentioning
confidence: 99%