Combined effect of nitrogen and pulsed microwave plasma on diamond growth

Chatei, Hassan; Bougdira, J.; Remy, M.; Alnot, P.; Bruch, Christian; Krüger, Jan

doi:10.1016/s0925-9635(96)00656-5

Cited by 24 publications

(20 citation statements)

References 13 publications

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“…24,[33][34][35][36][37] This hypothesis is supported by an observed decreased C 2 concentration in microwave plasma CVD when nitrogen is added. ͑ii͒ A decrease in the atomic hydrogen concentration in the gas phase, which leads to changes in the gas-phase chemistry.…”

Section: Introductionmentioning

confidence: 77%

Influence of nitrogen on diamond growth in oxyacetylene combustion chemical vapor deposition

Croon

Kleijn

Marin

et al. 2002

Journal of Applied Physics

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Document VersionPublisher's PDF, also known as Version of Record (includes final page, issue and volume numbers) Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. Addition of di-nitrogen to the feed gas has been shown to greatly influence growth rates and morphology of the deposited layer in various diamond chemical vapor deposition ͑CVD͒ techniques. In this article, several hypotheses for these phenomena, as presented in literature, are tested for the case of diamond combustion CVD with the aid of an atmospheric pressure oxyacetylene flame. For this purpose, one-dimensional and two-dimensional simulations are performed of the hydrodynamics, the combustion and deposition chemistry, and the nitrogen chemistry. Based on the simulation results, several proposed hypotheses can be ruled out as possible explanations for the observed phenomena. It is concluded, that the most likely hypotheses are: ͑i͒ the presence of nitrogen atoms in the diamond lattice, enhancing diamond growth by acting on the electron structure of surface dimer bonds, and ͑ii͒ selective adsorption of nitrogen-containing species on the surface, selectively increasing growth in the ͑100͒ direction. It is found that possible gas phase candidates for affecting diamond growth are NH, NH 2 , NH 3 , CN, HCN, H 2 CN, and NCO.

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Section: Introductionmentioning

confidence: 77%

Influence of nitrogen on diamond growth in oxyacetylene combustion chemical vapor deposition

Croon

Kleijn

Marin

et al. 2002

Journal of Applied Physics

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“…Laimer et al [10] reported that the variation of the average power induced by the PW mw discharges influences substrate temperature, deposition rate, film morphology and structure, without effectively improving the diamond deposition process with respect to the CW one. Chatei et al [11] observed an increase of atomic hydrogen in the plasma phase and a decrease of graphite contamination in the diamond films under PW mw plasmas at 500 Hz and DC of 50%. More recently the authors of refs.…”

Section: Introductionmentioning

confidence: 99%

“…The growth of diamond-based materials as single- [9], poly- [10][11][12][13][14] and nano-crystalline diamond films [8,15] by means of PW microwave (mw) plasmas has been and is still a hot research topic. Several explanations of the obtained results have been put forward.…”

Section: Introductionmentioning

confidence: 99%

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Study of polycrystalline diamond deposition by continuous and pulsed discharges

Cicala¹,

Brescia²,

Nitti³

et al. 2010

Surface and Coatings Technology

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“…9,10 As a result with pulsed plasmas higher chemical conversion rates but also improved etching and deposition processes can be realized. [11][12][13][14] For further progress in understanding of molecular processes in particular in plasmas under nonstationary excitation condition there is a need of improved temporal resolution of TDLAS, i.e., for improved sensitive high speed diagnostics. For these purposes a compact and transportable two laser beam infrared ͑TOBI͒ system has been designed for simultaneous measurement of two gaseous species with two tunable lasers operating simultaneously.…”

Section: Introductionmentioning

confidence: 99%

TOBI: A two-laser beam infrared system for time-resolved plasma diagnostics of infrared active compounds

McManus

Nelson

Zahniser

et al. 2003

Review of Scientific Instruments

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Articles you may be interested inA field programmable gate array-based time-resolved scaler for collinear laser spectroscopy with bunched radioactive potassium beams Rev. Sci. Instrum. 85, 093503 (2014); 10.1063/1.4895461 Energy-partition diagnostic for measuring time-resolved scattering and absorption in burst-mode laser ablation Rev. Sci. Instrum. 85, 033101 (2014); 10.1063/1.4866658 Time-resolved multiple probe spectroscopy Rev. Sci. Instrum. 83, 103107 (2012); 10.1063/1.4758999 Time-resolved spectroscopic diagnostic of laser-induced plasma on germanium targets

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Combined effect of nitrogen and pulsed microwave plasma on diamond growth

Cited by 24 publications

References 13 publications

Influence of nitrogen on diamond growth in oxyacetylene combustion chemical vapor deposition

Influence of nitrogen on diamond growth in oxyacetylene combustion chemical vapor deposition

Study of polycrystalline diamond deposition by continuous and pulsed discharges

TOBI: A two-laser beam infrared system for time-resolved plasma diagnostics of infrared active compounds

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