Combined magnetron sputtering and pulsed laser deposition of TiO
                2
               and BFCO thin films

Benetti, Daniele; Nouar, Rafik; Nechache, Riad; Pépin, H.; Sarkissian, A.; Rosei, Federico; MacLeod, Jennifer

doi:10.1038/s41598-017-02284-0

Cited by 43 publications

(19 citation statements)

References 37 publications

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“…There have been several reports combining MS and PLD (MSPLD) for the deposition of thin films for materials such as carbides and diamond-like carbon films [22], ternary wolfram borides [23] or tin oxide films [24]. The advantages of the combined MS and PLD deposition is a smoother surface [24] and a denser and higher hardness of the obtained films [23].…”

Section: Introductionmentioning

confidence: 99%

Influence of Deposition Method on the Structural and Optical Properties of Ge2Sb2Te5

et al. 2021

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Ge2Sb2Te5 (GST-225) is a chalcogenide material with applications in nonvolatile memories. However, chalcogenide material properties are dependent on the deposition technique. GST-225 thin films were prepared using three deposition methods: magnetron sputtering (MS), pulsed laser deposition (PLD) and a deposition technique that combines MS and PLD, namely MSPLD. In the MSPLD technique, the same bulk target is used for sputtering but also for PLD at the same time. The structural and optical properties of the as-deposited and annealed thin films were characterized by Rutherford backscattering spectrometry, X-ray reflectometry, X-ray diffraction, Raman spectroscopy and spectroscopic ellipsometry. MS has the advantage of easily leading to fully amorphous films and to a single crystalline phase after annealing. MS also produces the highest optical contrast between the as-deposited and annealed films. PLD leads to the best stoichiometric transfer, whereas the annealed MSPLD films have the highest mass density. All the as-deposited films obtained with the three methods have a similar optical bandgap of approximately 0.7 eV, which decreases after annealing, mostly in the case of the MS sample. This study reveals that the properties of GST-225 are significantly influenced by the deposition technique, and the proper method should be selected when targeting a specific application. In particular, for electrical and optical phase change memories, MS is the best suited deposition method.

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Section: Introductionmentioning

confidence: 99%

Influence of Deposition Method on the Structural and Optical Properties of Ge2Sb2Te5

et al. 2021

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“…There have been some published reports on combining MS and PLD for the deposition of carbides and diamond-like carbon films [35], tin oxide films [36], GST-225 [37], and ternary wolfram borides [38]. Simultaneous MS and PLD deposition can lead to a denser film [36] with a smoother surface [38].…”

Section: Introductionmentioning

confidence: 99%

The Effect of the Deposition Method on the Structural and Optical Properties of ZnS Thin Films

et al. 2021

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ZnS is a wide band gap material which was proposed as a possible candidate to replace CdS as a buffer layer in solar cells. However, the structural and optical properties are influenced by the deposition method. ZnS thin films were prepared using magnetron sputtering (MS), pulsed laser deposition (PLD), and a combined deposition technique that uses the same bulk target for sputtering and PLD at the same time, named MSPLD. The compositional, structural, and optical properties of the as-deposited and annealed films were inferred from Rutherford backscattering spectrometry, X-ray diffraction, X-ray reflectometry, Raman spectroscopy, and spectroscopic ellipsometry. PLD leads to the best stoichiometric transfer from target to substrate, MS makes fully amorphous films, whereas MSPLD facilitates obtaining the densest films. The study reveals that the band gap is only slightly influenced by the deposition method, or by annealing, which is encouraging for photovoltaic applications. However, sulphur vacancies contribute to lowering the bandgap and therefore should be controlled. Moreover, the results add valuable information towards the understanding of ZnS polymorphism. The combined MSPLD method offers several advantages such as an increased deposition rate and the possibility to tune the optical properties of the obtained thin films.

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“…Materials of ceramic coating on the structural materials is one of the candidates of high temperature materials for the deployment of advanced nuclear reactors and applications in many fields [5][6][7][8][9][10]. There are many techniques for the ceramic coating such as plasma spray coating [5], electrophoretic deposition (EPD) [6] and pulsed laser deposition (PLD) [7][8][9][10]. One of the issues for the ceramic coating is formation of the roughness and micro porous.…”

Section: Introductionmentioning

confidence: 99%

“…One of the issues for the ceramic coating is formation of the roughness and micro porous. It has been reported that the PLD technique has advantage for minimize the micro porous [7][8][9][10]. In the utilization of the coating material especially for the deployment of advanced nuclear reactors, it is very important to select the substrate materials for ceramic coating as the base materials.…”

Section: Introductionmentioning

confidence: 99%

“…In this study, YSZ (Ytrria-Stabilized Zirconia, Y 2 O 3 -ZrO 2 ) ceramic-coated austenitic steel SS316L with PLD technique is reported. YSZ material has advantages as coating materials to protect the substrate at high temperature [7][8][9][10]. The aim of the study is to develop high quality of YSZ ceramic coating layer on the surface of SS316L with smooth roughness of surface and minimizing porosity.…”

Section: Introductionmentioning

confidence: 99%

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Deposition of Yttria-Stabilized Zirconia Ceramic on Ss316l by Pulsed Solid-State Nd:yag Laser

Panitra¹,

Rivai²

2019

jsmi

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Austenitic stainless steel in general has a limited service temperature up to 600°C. Nevertheless, service temperature more than that temperature are one of the key feature of advanced nuclear reactors to gain higher thermal efficiency which is related to economic beneficial, and also to withstand from abnormal condition. However, austenitic stainless steel such as SS316 class is well-known structure material for nuclear power reactors and other power plants. Therefore, one of the key issue is to modify SS316 so that has capability to service higher temperature. One of the technique for that purpose is ceramic-coated SS316L. In this preliminary study, thin films of zirconia-based ceramic i.e. YSZ (Yttria-Stabilized Zirconia) have been deposited on a SS316L using Plasma-Pulsed Laser Deposition (PLD) at Center For Science and Technology of Advanced Materials laboratory – National Nuclear Energy Agency of Indonesia (BATAN). Thin film was deposited with the constant oxygen flow injection of 20 and 40 sccm (Standard Cubic Centimeters per Minute) that produce a chamber pressure of 60 and 200 mTorr for the numbers of laser shots of 7.2×104 and 14.4×104, respectively. The substrate temperature during deposition was of 850oC. Afterward, the samples were analyzed using Optical Microscope, Scanning Electron Microscope – Energy Dispersive X-ray Spectroscope (SEM-EDS) and Atomic Force Microscope (AFM). The results showed that the YSZ could homogeneously and sticky deposited on the surface of the SS316L surface. The surfaces were very smoothly formed with the surface roughness in the nano-meter scale range of 20-90 nm.

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Combined magnetron sputtering and pulsed laser deposition of TiO 2 and BFCO thin films

Cited by 43 publications

References 37 publications

Influence of Deposition Method on the Structural and Optical Properties of Ge2Sb2Te5

Influence of Deposition Method on the Structural and Optical Properties of Ge2Sb2Te5

The Effect of the Deposition Method on the Structural and Optical Properties of ZnS Thin Films

Deposition of Yttria-Stabilized Zirconia Ceramic on Ss316l by Pulsed Solid-State Nd:yag Laser

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