Combining magnetic filtered cathodic arc deposition with ion beam sputtering to afford superhard TiSiN multilayer composite films with tunable microstructure and mechanical properties

Effect of Gradient Multilayer Design on Tribological Performance of TiN/TiSiN Coatings Prepared by Cathodic Arc Ion Plating

“…XRD residual stress measurements were used to evaluate the macro-stress in the coatings, as shown in Figure 9. The compressive residual stresses of gradient multilayer coatings were −2.25, −2.71, −2.8, −1.9, −2.59, and −2.12 GPa, which are reduced in comparison to the monolayer TiSiN coating (about −7.8 GPa) [73], confirming that the construction of multilayer structures can effectively reduce the stresses [74]. Increasing the residual compressive stress can prevent the propagation of cracks and improve the resistance to adhesive wear of the coating, but excessive residual stress may cause the coating to separate from the substrate.…”

Structure and Mechanical Properties of PVD and CVD TiAlSiN Coatings Deposited on Cemented Carbide

“…In the HRTEM image (Figure 6b), it can be seen that the size of amorphous SiN x (circled by black circles) is between 1 and 3 nm. Meanwhile, the possibility that Si atoms are accommodated in the (Ti, Al, Si)N solid solution was not ruled out, since Si atoms exists in the solid solution in TiSiN, TiSiCN, and other coatings [12,44,45]. This proved that the structure of TiAlSiN is a kind of nano-composite structure, in which the amorphous SiN X matrix contains nano-crystals.…”