Combustion chemical vapor deposition: A novel thin-film deposition technique

Hunt, Andrew; Carter, W. B.; Cochran, Jack

doi:10.1063/1.110362

Cited by 129 publications

(58 citation statements)

References 3 publications

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“…[19,20] Precursors are dissolved in a flammable solvent and the solution delivered to a burner where it is ignited to give a flame. The substrate is then passed repeatedly under the flame to build up a coating.…”

Section: Introductionmentioning

confidence: 99%

Growth of Thin Films of Molybdenum and Tungsten Oxides by Combustion CVD Using Aqueous Precursor Solutions

Davis

Benito

Sheel

et al. 2004

Chemical Vapor Deposition

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Using combustion chemical vapour deposition, layers of molybdenum and tungsten oxides have been deposited on glass and silicon at low temperatures. Inexpensive ammonium salts of molybdate and metatungstate ions were used as precursors and were delivered to the coating flame as an aqueous solution using a nebuliser. The resulting films were analysed by scanning electron microscopy (SEM), energy dispersive analysis of X-rays (EDAX), Rutherford backscattering (RBS), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD).These indicate that the films are continuous, moderately smooth and consist of amorphous, disordered molybdenum and tungsten trioxides.

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Section: Introductionmentioning

confidence: 99%

Growth of Thin Films of Molybdenum and Tungsten Oxides by Combustion CVD Using Aqueous Precursor Solutions

Davis

Benito

Sheel

et al. 2004

Chemical Vapor Deposition

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“…As such, this chapter does not cover synthesis of films, coatings, or deposits that are made by aerosol processes, including suspended droplets or particles deposited in a molten state on surfaces at high temperatures by flames, plasma, or torches, or at low temperatures by high-pressure sprays or electrospraying. This technology is called "thermal spray coating, " as reviewed by Clyne and Gill (1996), or just "spray coating" or "combustion chemical vapor deposition" (Hunt et al, 1993);and Tricoli and colleagues (2010) have recently reviewed its use for gas sensors. This chapter also does not discuss the manufacture of optical fibers involving oxidation of precursor vapors and deposition of fine silica-based particles and eventual fiber drawing (Rowell, 1986).…”

Section: Introductionmentioning

confidence: 99%

Aerosol Science and Technology: History and Reviews

Ensor¹

2011

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Aerosol Science and Technology: History and Reviews captures an exciting slice of history in the evolution of aerosol science. It presents in-depth biographies of four leading international aerosol researchers and highlights pivotal research institutions in New York, Minnesota, and Austria. One collection of chapters reflects on the legacy of the Pasadena smog experiment, while another presents a fascinating overview of military applications and nuclear aerosols. Finally, prominent researchers offer detailed reviews of aerosol measurement, processes, experiments, and technology that changed the face of aerosol science. This volume is the third in a series and is supported by the American Association for Aerosol Research (AAAR) History Working Group, whose goal is to produce archival books from its symposiums on the history of aerosol science to ensure a lasting record. It is based on papers presented at the Third Aerosol History Symposium on September 8 and 9, 2006, in St. Paul, Minnesota, USA.

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“…The enabling NanoSpray Combustion process used to make the nanopowders discussed in this publication is proprietary to nGimat. It is an outbranch of nGimat's combustion chemical vapor deposition (CCVD) process which has been demonstrated to create thin films of many different compositions at a high rate for low cost [14,15]. While CCVD process can be used to form nanostructured thin films, the version of this process that is used to make nanopowders is referred to as combustion chemical vapor condensation (CCVC).…”

Section: Introductionmentioning

confidence: 99%

High-Purity Nanopowders for Laser Applications

Ganta

Venugopal

Hunt

et al. 2012

ISRN Nanotechnology

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We have successfully developed high-quality laser-grade yttrium aluminum garnet (YAG), and lutetium oxide (Lu 2 O 3 ), using a novel combustion chemical vapor condensation (CCVC) technique based on a proprietary NanoSpray Combustion process. The purity of the nanopowders was >99%. Nanopowders with different dopants have been synthesized over a 10-200 nm size range, with low-cost, high-purity precursors that are viable for large-scale production. Great strides have also been made in developing highly dense (>99% theoretical density) polycrystalline Nd-doped YAG pellets using vacuum sintering and hot isostatic pressing (HIP). This method is an alternative to the Czochralski method for making single-crystal ceramic bodies, which has several disadvantages including high cost, size, shape restrictions, and limitations in Nd concentrations (∼1 at %). Nanomaterials also enable higher percentages of Nd to be incorporated into the YAG lattice which improves laser efficiency and >85% near IR transmission, thereby reducing scattering losses associated with larger grain-size polycrystalline materials.

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Combustion chemical vapor deposition: A novel thin-film deposition technique

Cited by 129 publications

References 3 publications

Growth of Thin Films of Molybdenum and Tungsten Oxides by Combustion CVD Using Aqueous Precursor Solutions

Growth of Thin Films of Molybdenum and Tungsten Oxides by Combustion CVD Using Aqueous Precursor Solutions

Aerosol Science and Technology: History and Reviews

High-Purity Nanopowders for Laser Applications

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