Surface chemical ordering of group III elements in the ternary alloy In Ga~, . As, stabilizing the 2 X 3 reconstruction at the surface composition In 067Ga() 33As, is demonstrated on the basis of x-ray diffraction data. An incommensurate 2 & n reconstruction is observed for lower In surface concentrations, achieved by burying an InAs monolayer under a number of GaAs layers and letting the In surface segregation process operate. A quantitative account of the intensity measured in the incommensurate phase is obtained by using a probabilistic distribution of Gaand In-rich structural elements. PACS numbers: 68.35.Bs, 61.10.Lx, 68.55.Bd Ternary and quaternary III-V semiconductor alloys are key materials in advanced technology for optoelectronics and microwave devices. The ultimate performances