“…To date, 15 metal diaphragm pressure wave generators have been made and operated with swept volumes from 20 cc to 1000 cc and with 500 W to 30 kW input power, respectively. The DPWGs have been successfully used to provide pressure waves for single or multiple pulse tube refrigerators with up to 1200 W of refrigeration at 77 K at an efficiency 15% of the Carnot COP [9,10]. The DPWG employs two opposed metal diaphragms that balance each other's average gas forces.…”