Eighth Symposium on Novel Photoelectronic Detection Technology and Applications 2022
DOI: 10.1117/12.2624043
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Common-path and synchronous phase shifting of lateral shearing interferometry based on micro-polarizer array

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Cited by 2 publications
(2 citation statements)
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“…This system not only enables the measurement of surface shape and roughness but also enables the detection of large-aperture surfaces using a sub-aperture stitching technique based on structural optimization. In 2022, Our team [6] proposed the application of micro-polarization arrays as phase-shifting devices in a multi-directional lateral shearing interferometry system to achieve high-precision measurements of aspherical optical elements.…”
Section: Introductionmentioning
confidence: 99%
“…This system not only enables the measurement of surface shape and roughness but also enables the detection of large-aperture surfaces using a sub-aperture stitching technique based on structural optimization. In 2022, Our team [6] proposed the application of micro-polarization arrays as phase-shifting devices in a multi-directional lateral shearing interferometry system to achieve high-precision measurements of aspherical optical elements.…”
Section: Introductionmentioning
confidence: 99%
“…The function of the polarizer array was to generate varying phase shifts for different regions of a CCD. Siqi Wang et al [23] proposed a common-path and synchronous phase-shifting of lateral shearing interferometry which also needed a micropolarizer array for phase shifting. These additional optical elements require specific design, which is difficult to obtain.…”
Section: Introductionmentioning
confidence: 99%