Communication—Development of Discharge-Assisted Electrophoretic Deposition and Demonstration for TiN Deposition

Abstract

In this study, a novel electrophoretic deposition (EPD) method with field-emitting surface dielectric barrier discharges (FESDBDs) was developed. As the discharges are sustained by the electrons generated via the tunneling effect, FESDBDs are ideal for supplying charges by avoiding chemical reactions. Furthermore, since the particles are charged via FESDBDs, chemical pretreatments are not required to impart charge to the particles. Herein, as a first demonstration of a discharge-assisted EPD, a TiN film was deposited in silicone oil. Assuming that the deposition rate in this study was limited by the charging process of the particles, a new deposition model was constructed.