Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

Sun, Chuang; Cai, Shengbao; Liu, Yusheng; Qiao, Yanfeng

doi:10.3390/app10155057

Cited by 9 publications

(3 citation statements)

References 26 publications

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“…The straightness error is received by the CMOS camera. The comparison deviation of the horizontal straightness and the vertical straightness are ±2.8 and ±3.1 µm for the measuring distance of 1000 mm [15].…”

Section: Introductionmentioning

confidence: 88%

Metrology and Measurement Systems

Xu,

Li,

Zhao

et al. 2021

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A laser measurement system for measuring straightness and parallelism error using a semiconductor laser was proposed. The designing principle of the developed system was analyzed. Addressing at the question of the divergence angle of the semiconductor laser being quite large and the reduction of measurement accuracy caused by the diffraction effect of the light spot at the long working distance, the optical structure of the system was optimized through a series of simulations and experiments. A plano-convex lens was used to collimate the laser beam and concentrate the energy distribution of the diffraction effect. The working distance of the system was increased from 2.6 m to 4.6 m after the optical optimization, and the repeatability of the displacement measurement is kept within 2.2 m in the total measurement range. The performance of the developed system was verified by measuring the straightness of a machine tool through the comparison tests with two commercial multi-degree-of-freedom measurement systems. Two different measurement methods were used to verify the measurement accuracy. The comparison results show that during the straightness measurement of the machine tool, the laser head should be fixed in front of the moving axis, and the sensing part should move with the moving table of the machine tool. Results also show that the measurement error of the straightness measurement is less than 3 m compared with the commercial systems. The developed laser measurement system has the advantages of high precision, long working distance, low cost, and suitability for straightness and parallelism error measurement.

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Section: Introductionmentioning

confidence: 88%

Metrology and Measurement Systems

Xu,

Li,

Zhao

et al. 2021

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“…Precision measurement with multiple degrees of freedom (DOF) can be used to accurately detect the position and presence of objects in planar or three-dimensional space, which have been widely used in machining positioning and motion driving in ultraprecision machining processes [1][2][3]. The measured degrees of freedom typically include linear parameters (e.g., displacement in three linear axes) and angular parameters (e.g., roll angle, yaw angle, and pitch angle) [4,5]. In the past decades, several optical methods have been reported for multiple-DOF measurement, including laser interferometry, autocollimation, and grating diffraction interferometry [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Combined Displacement and Angle Sensor with Ultra-High Compactness Based on Self-Imaging Effect of Optical Microgratings

Zhang,

Yang,

Niu

et al. 2024

Sensors

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In this paper, an ultracompact combined sensor for displacement and angle-synchronous measurement is proposed based on the self-imaging effect of optical microgratings. Using a two-grating structure, linear and angular displacement can be measured by detecting the change of phase and amplitude of the optical transmission, respectively, within one single structure in the meantime. The optically transmitted properties of the two-grating structure are investigated in both theory and simulation. Simulated results indicate that optical transmission changes in a sinusoidal relationship to the input linear displacement. Meanwhile, the amplitude of the curve decreases with an input pitch angle, indicating the ability for synchronous measurement within one single compact structure. The synchronous measurement of the linear displacement and the angle is also demonstrated experimentally. The results show a resolution down to 4 nm for linear displacement measurement and a maximum sensitivity of 0.26 mV/arcsec within a range of ±1° for angle measurement. Benefiting from a simple common-path structure without using optical components, including reflectors and polarizers, the sensor shows ultra-high compactness for multiple-degrees-of-freedom measuring, indicating the great potential for this sensor in fields such as integrated mechanical positioning and semiconductor fabrication.

show abstract

“…Precision measurement with multiple degrees of freedom (DOF) can be used to accurately detect the position and presence of objects in planar or three-dimensional space, which have been widely used in machining positioning and motion driving in ultra-precision machining processes [1][2][3]. The measured degrees of freedom typically include linear parameters (e.g., displacement in three linear axes) and angular parameters (e.g., roll angle, yaw angle and pitch angle) [4,5]. In past decades, several optical methods have been reported for multiple-DOF measurement, including laser interferometry, autocollimation and grating diffraction interferometry [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Combined Displacement and Angle Sensor with Ultrahigh Compactness Based on Self-imaging Effect of Optical Microgratings

Zhang,

Yang,

Niu

et al. 2023

Preprint

View full text Add to dashboard Cite

In this paper, an ultracompact combined sensor for displacement and angle synchronous measurement is proposed based on self-imaging effect of optical microgratings. Using a two-grating structure, linear and angular displacement can be measured by detecting the change of phase and amplitude of the optical transmission respectively within one single structure in meantime. The optical transmitted properties of the two-grating structure are investigated in both theory and simulation. Simulated results indicate that, the optical transmission changes in a sinusoidal relationship to the input linear displacement. Meanwhile, the amplitude of the curve decreases with an input pitch angle, indicating the ability for synchronous measurement within one single compact structure. The synchronous measurement of the linear displacement and the angle is also demonstrated experimentally. The results show a resolution down to 4nm for linear displacement measurement, and a sensitivity of 0.26mV/arcsec within a range of ±1° for angle measurement. Benefitting from a simple common-path structure without using optical components including reflectors and polarizers, the sensor shows an ultrahigh compactness for multiple-degrees-of-freedom measuring, indicating the great potential for this sensor in the fields such as integrated mechanical positioning and semiconductor fabrication.

show abstract

Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

Cited by 9 publications

References 26 publications

Metrology and Measurement Systems

Metrology and Measurement Systems

Combined Displacement and Angle Sensor with Ultra-High Compactness Based on Self-Imaging Effect of Optical Microgratings

Combined Displacement and Angle Sensor with Ultrahigh Compactness Based on Self-imaging Effect of Optical Microgratings

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