Silicon photonic technologies exploit silicon as an optical material to build a wide array of devices and systems. It has a vast and growing market in fields such as telecommunications, sensors, displays, and biomedical instrumentations. The flexibility, modularity and stability of silicon photonic systems provide unprecedented opportunities for next-generation quantum key distribution (QKD) and quantum networking. This doctoral thesis focuses on the design, simulation, fabrication, and experiment of QKD chips based on silicon photonics. Crucial components for QKD chips are designed and fabricated, including the grating coupler, polarization beam splitter, polarization rotator, modulator, photodetector, ring resonator and interferometer. Using these components, chip-based continuous variable quantum key distribution (CV-QKD) is demonstrated for the first time. The thesis focuses on three parts: the passive components, the active components, and the integrated QKD chip. For the passive components, the twodimensional grating coupler can be used as a path-to-polarization mode converter, the polarization beam splitter separates or combines two polarization states on-chip, and the polarization rotator rotates the polarization state between transverse electric and transverse magnetic modes. All the polarization manipulation components are essential for expanding the available degree of freedom of the photon. The Mach-Zehnder interferometer and ring resonator are the core components used in the modulator. Both are designed, simulated, fabricated and experimentally characterized. Active components, including modulators and detectors are also studied in this thesis. For modulator, a thermo-optic modulator and a carrier injection modulator are Nomenclature XXII Nomenclature ALD Atomic layer deposition AM Amplitude modulator ASE Amplified spontaneous emission BARC Bottom anti-reflective coating Bps Bits per second CMOS Complementary metal-oxide-semiconductor CMP Chemical-mechanical planarization COW Coherent one way CVD Chemical vapor deposition CV-QKD Continuous variable QKD CW Continuous wave