Laser irradiation of polymeric materials has drawn great
attention
as a fast, simple, and cost-effective method for the formation of
porous graphene films that can be subsequently fabricated into low-cost
and flexible electronic and energy-storage devices. In this work,
we report a systematic study of the formation of laser-induced graphene
(LIG) with sheet resistances as low as 9.4 Ω/sq on parylene-C
ultrathin membranes under a CO2 infrared laser. Raman analysis
proved the formation of the multilayered graphenic material, with I
D/I
G and I
2D/I
G peak ratios
of 0.42 and 0.65, respectively. As a proof of concept, parylene-C
LIG was used as the electrode material for the fabrication of ultrathin,
solid-state microsupercapacitors (MSCs) via a one-step, scalable,
and cost-effective approach, aiming at future flexible and wearable
applications. The produced LIG-MSC on parylene-C exhibited good electrochemical
behavior, with a specific capacitance of 1.66 mF/cm2 and
an excellent cycling stability of 96% after 10 000 cycles (0.5
mA/cm2). This work allows one to further extend the knowledge
in LIG processes, widening the group of precursor materials as well
as promoting future applications. Furthermore, it reinforces the potential
of parylene-C as a key material for next-generation biocompatible
and flexible electronic devices.