Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation

Abstract

The presented study compares the structure of hexamethyldisiloxane (HMDSO) and hexamethyldisilazane (HMDSN) plasma polymer thin films with a thickness of about 30 nm before and after a plasma oxidation process, focusing on the analysis of porosity and the correlated electrolyte up-take in the formed

Complementary spectroscopic and electrochemical analysis of the sealing of micropores in hexamethyldisilazane plasma polymer films by Al2O3 atomic layer deposition

“…The XPS core level peaks with fitted components are shown in Figure 3. The Si2p peaks were fitted with the spin‐orbit doublet (Si2p 3/2 and Si2p 1/2 ) with a peak separation of 0.6 eV and an intensity ratio of Si2p 3/2 :Si2p 1/2 = 2:1 34 . For the fitting of Al2p peak, the spin‐orbit doublet (Al2p 3/2 and Al2p 1/2 ) was considered with a peak separation of 0.44 eV and an intensity ratio of Al2p 3/2 :Al2p 1/2 = 2:1 35 …”

“…This reactor was also equipped with a Cr/Au coated 5 MHz‐QCM crystal (Fil‐Tech Inc.) that allowed simultaneous deposition of thin films as well as monitoring of the growth rates. More details about the setup and deposition parameters have been described in a previous literature 34 …”

“…A radio frequency electrode provided by Advanced Energy Industries Inc. (f = 13.56 MHz) was used for power supply. Detailed description of the setup can be found in the previous literature 34 . In this study, a power of 63 W was applied and the DC bias voltage was 106 V. The pressure of the chamber was kept at 10 −4 mbar prior to the experiments.…”

“…The spectrometer used for the DPM‐IRRAS measurements was a Bruker Vertex 70 having a mercury cadmium telluride detector cooled with liquid nitrogen. The modulation of p‐ and s‐polarization was performed by a rotatable KRS‐5 polarizer, the details of which can be found elsewhere 34 . The spectra were recorded in the wavenumber range of 3800–700 cm −1 at an incidence angle of 75°.…”

“…The measurements were performed at a base pressure of 10 −5 mbar. The data were fitted by a Cauchy optical model with the absorption coefficient k (λ) = 0, which is suitable for transparent films 34 …”