Surface and Coatings Technology
 1999
DOI: 10.1016/s0257-8972(99)00098-5
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Comparative measurements of annihilation rate coefficients of fluorine radicals in a r.f. SF6 plasma by different time-resolved actinometry techniques

V. Shogun
1
,
A. Tyablikov
2
,
V. M. Pashkov
3
et al.
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