Comparative study of Au/Ti, Au/V and Au/Zr films oxygen gettering ability

Wu, MF; Moulin, Johan; Coste, Philippe; Perrot, Sylvain; Perrossier, J.-L.; Renard, Charles; Bosseboeuf, Alain

doi:10.1016/j.tsf.2016.09.003

Cited by 12 publications

(15 citation statements)

References 14 publications

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“…The gold particles had a tendency to diffuse into the matrix of titanium (Fig. 4b) which was in agreement with other researchers' findings [25]. This reciprocal diffusion of gold and titanium made more fresh titanium atoms exposed at the forefront of incoming oxygen atoms/ ions to form more oxides.…”

Section: Discussionsupporting

confidence: 91%

Impact of the Amount of the Gold Layer on the Tribological Performance of the Ceramic Conversion Treated CP-Titanium

Zhang

et al. 2023

Tribol Lett

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Titanium alloys are characterised by poor tribological properties, and a ceramic TiO2 layer formed on the surface can greatly improve its performance. By pre-depositing a gold layer on the titanium surface, the gold particles promoted the outward diffusion of titanium in the ceramic conversion treatment to react with the inward-coming oxygen to form a compact titanium dioxide layer. The surface morphology, microstructure, and phase constituents were characterised by SEM/EDX and XRD. The adhesion of the oxide layers was assessed by a scratch test. The distribution of gold particles in the oxide layer enhanced the surface hardness and reduced the friction and wear against a WC (tungsten carbide) ball in the reciprocal tribological test. The ceramic conversion process was accelerated efficiently at 620–660 °C, and the more gold pre-deposited, the thicker the oxide layer. Graphical Abstract

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Section: Discussionsupporting

confidence: 91%

Impact of the Amount of the Gold Layer on the Tribological Performance of the Ceramic Conversion Treated CP-Titanium

Zhang

et al. 2023

Tribol Lett

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“…The gold particles have a tendency to diffuse into the matrix of titanium (Fig. 4b) which is in agreement with other researchers' ndings [22]. This reciprocal diffusion of gold and titanium makes more fresh titanium atoms exposed at the forefront of incoming oxygen atoms/ions to form more oxides.…”

Section: : Discussionsupporting

confidence: 91%

Impact of the amount of the gold layer on the tribological performance of the ceramic conversion treated CP-Titanium

Zhang

et al. 2022

Preprint

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Titanium alloys are characterised by poor tribological properties, and a ceramic TiO2 layer formed on the surface can greatly improve its performance. By pre-depositing a gold layer on the titanium surface, the gold particles promote the outward diffusion of titanium in the ceramic conversion treatment to react with the inward-coming oxygen to form a compact titanium dioxide layer. The surface morphology, microstructure, phase constituents were characterised by SEM/EDX and XRD. The adhesion o the oxide layers were assessed by a scratch test. The distribution of gold particles in the oxide layer can enhance the surface hardness and reduce friction and wear against a WC ball in the reciprocal tribological test. The ceramic conversion process can be accelerated efficiently at 620-660°C, and the more gold pre-deposited, the thicker the oxide layer.

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“…multilayers.-The proposed Au/Zr/V/Zr multilayer getter combines a top Au/Zr bilayer getter known to have a low activation temperature 7 and a bottom V/Zr bilayer having the capability shown above of in-depth trapping of oxygen (and possibly of other gases). Indeed, since the Zr oxide film thickness under the vanadium film was found equal to 25 nm for vanadium thicknesses below or equal to 100 nm and annealing conditions of 300 • C for 1h, we considered promising such a multilayer as getter films able to adsorb gases at room temperature after activation.…”

Section: Au 20nm /Zr 20nm /V 20nm /Zr 100nmmentioning

confidence: 99%

“…Typically, a thin protective or sacrificial layer such as Cu, Ag, Au, Ir, Os, Pd, Pt or Ni is used to cover the getter film to prevent its oxidation. [6][7][8][9][10] Activation of such composite getter film is obtained by out-diffusion of atoms through the protecting layer or by surface diffusion of the surface layers atoms, leading to unprotected zones of the active material. 9 The choice of protective/sacrificial layer and of the sublayer is important.…”

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confidence: 99%

Multilayer Thin Film Getter for Sustainable Vacuum in MEMS Packaging

Moulin

Bosseboeuf

2018

ECS J. Solid State Sci. Technol.

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In this work, we investigate Au/Zr/V/Zr multilayer getters in order to get a sustainable low pressure in a packaging cavity. These films were analyzed by using four probe resistivity measurements, SEM and TEM cross section observations and Energy Dispersive X-Ray Spectrometry (EDX) measurements. It is demonstrated that the activation temperature of a zirconium layer covered with a vanadium layer depends on the vanadium layer thickness. Other experiments demonstrate that Au/Zr/V/Zr multilayer getter films can be activated at low temperature and that suitable sorption properties to get a low pressure in a medium size vacuum package during 9 months can be achieved after activation at 300 • C for 1 hour.

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Comparative study of Au/Ti, Au/V and Au/Zr films oxygen gettering ability

Cited by 12 publications

References 14 publications

Impact of the Amount of the Gold Layer on the Tribological Performance of the Ceramic Conversion Treated CP-Titanium

Impact of the Amount of the Gold Layer on the Tribological Performance of the Ceramic Conversion Treated CP-Titanium

Impact of the amount of the gold layer on the tribological performance of the ceramic conversion treated CP-Titanium

Multilayer Thin Film Getter for Sustainable Vacuum in MEMS Packaging

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