2005
DOI: 10.1016/j.tsf.2004.08.067
|View full text |Cite
|
Sign up to set email alerts
|

Comparative study of chromium nitride coatings deposited by unbalanced and balanced magnetron sputtering

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4

Citation Types

1
51
0
8

Year Published

2007
2007
2021
2021

Publication Types

Select...
9
1

Relationship

0
10

Authors

Journals

citations
Cited by 107 publications
(60 citation statements)
references
References 46 publications
1
51
0
8
Order By: Relevance
“…Olaya et al [24] noted that the RF bias voltage influenced the crystal orientation and hardness of the deposits. Levy et al [25] studied the structural, mechanical, electronic and optical properties of transition metal nitrides (CrN, TiN, etc.)…”
Section: Introductionmentioning
confidence: 99%
“…Olaya et al [24] noted that the RF bias voltage influenced the crystal orientation and hardness of the deposits. Levy et al [25] studied the structural, mechanical, electronic and optical properties of transition metal nitrides (CrN, TiN, etc.)…”
Section: Introductionmentioning
confidence: 99%
“…Transition metal nitrides having bonds of a mixed nature of covalent, ionic and metallic character are of technological importance due to the combination of their functional properties that are associated with their unusual electronic bonding such as high hardness, high melting point and oxidation resistance (Olaya et al 2005). These coatings have found widespread use as hard wear protective coatings for cutting tools and wear applications, as diffusion barriers in micro electronic applications, and as corrosion and abrasion-wear resistant layers on optical and mechanical components (Deniel et al 2009).…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5][6][7][8][9][10] The research interests on fabricating CrN coatings and understanding the microstructure have been recently increased. [8][9][10] The CrN film exhibits micro-columnar growth on the substrate possessing a (100), (110), or (111) texture characteristic, which can be controlled by the growth conditions, film thickness, and the substrate material. 11 Such texture development during the growth has been observed and intensively discussed using X-ray diffraction and transmission electron microscopy (TEM).…”
Section: Introductionmentioning
confidence: 99%