Comparative study of mask architectures for EUV lithography

Pawloski, Adam R.; Fontaine, Bruno La; Levinson, Harry; Hirscher, Stefan; Schwarzl, S.; Lowack, Klaus; Kamm, Frank-Michael; Bender, Markus; Domke, Wolf-Dieter; Holfeld, Christian; Dersch, U.; Naulleau, Patrick; Letzkus, Florian; Butschke, Joerg

doi:10.1117/12.569289

Cited by 10 publications

(9 citation statements)

References 17 publications

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“…Fluoropolymers exhibit unique and remarkable properties, − such as thermal stability, chemical inertness (to acids, bases, organic solvents), low refractive indices, dielectric constants, and dissipation factors, are hydrophobic, display excellent weathering capabilities, and show interesting surface properties. Hence, these high-value-added materials can find applications in many fields of high technology: aeronautics, microelectronics, optics, , textile finishing, , the nuclear industry, paints and coatings, photovoltaic devices, and lithography . These specialty polymers are usually produced by radical (co)polymerization of fluorinated monomers.…”

Section: Introductionmentioning

confidence: 99%

Iodine Transfer Terpolymerization of Vinylidene Fluoride, α-Trifluoromethacrylic Acid and Hexafluoropropylene for Exceptional Thermostable Fluoropolymers/Silica Nanocomposites

et al. 2011

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The synthesis of poly(VDF-ter-TFMA-ter-HFP) terpolymers (where VDF, TFMA, and HFP stand for vinylidene fluoride, R-trifluoromethacrylic acid, and hexafluoropropylene, respectively) and their blends with silica filler for preparing original fluorocomposites are presented. First, the radical terpolymerization of VDF, TFMA, and HFP by iodine transfer polymerization without any surfactant was investigated in the presence of 1,6-diiodoperfluorohexane as the chain transfer agent. TFMA monomer was well incorporated, and the terpolymers were obtained in good yields (>65%). The microstructures of the produced terpolymers were characterized by 1 H and 19 F NMR spectroscopy to assess the amounts of each comonomer, the molecular weights, and the nature of the end groups of the copolymers. Molar percentages of VDF, TFMA, and HFP were in the 45-80, 12-53, and 1-8 ranges, respectively, whereas the molecular weights of the resulting terpolymers were ca. 5400-12 600 g 3 mol -1 . End groups were VDF-I only with a high amount of CH 2 CF 2 -I. Then, these poly(VDF-ter-TFMA-ter-HFP) terpolymers were involved in the preparation of the fluorinated polymers/silica nanocomposites by sol-gel reactions in the presence of tetraethoxysilane and silica nanoparticles under alkaline and acidic conditions, respectively. Interestingly, poly(VDF-ter-TFMA-ter-HFP) terpolymer/silica nanocomposites, which were prepared under alkaline conditions, showed exceptional thermal properties because they were found to exhibit almost no weight loss up to 800 °C.

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Section: Introductionmentioning

confidence: 99%

Iodine Transfer Terpolymerization of Vinylidene Fluoride, α-Trifluoromethacrylic Acid and Hexafluoropropylene for Exceptional Thermostable Fluoropolymers/Silica Nanocomposites

et al. 2011

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“…They are hydrophobic, show excellent weathering abilities, and display interesting surface properties. Hence, these high value‐added materials can find applications in many fields of high technology, such as aeronautics,5 microelectronics,6 optics,7, 8 textile finishing,9, 10 in the nuclear industry,11–13 in paints and coatings,14 and lithography 15. These specialty polymers can be produced by radical (co)polymerization of fluorinated monomers in organic solvent and supercritical CO 2 16–21; however, they are commonly made in aqueous processes 1–4, 11–13.…”

Section: Introductionmentioning

confidence: 99%

Iodine transfer copolymerization of vinylidene fluoride and α‐trifluoromethacrylic acid in emulsion process without any surfactants

Boyer

Améduri

2009

J. Polym. Sci. A Polym. Chem.

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The synthesis of poly(VDF-co-TFMA) copolymers (where VDF and TFMA stand for vinylidene fluoride and a-trifluoromethacrylic acid, respectively) by iodine transfer polymerization without any surfactant is presented. First, the synthesis and the control of the copolymerization of VDF and TFMA were investigated in the presence of two chain transfer agents, 1-perfluorohexyl iodide (C 6 F 13 I) and 1,4-diodoperfluorobutane (IC 4 F 8 I). TFMA monomer was incorporated in the copolymer in good yields. Moreover, the molecular weights of the resulting poly(VDF-co-TFMA) copolymers were in good agreement with the theoretical values for feed of TFMA/VDF ratios that ranged from 50/50 to 0/100 mol %, showing that TFMA does not disturb the controlled radical polymerization of VDF. The microstructures of the produced copolymers were characterized by 1 H and 19 F NMR to assess the amount of each comonomer, and the molecular weights and the end-groups of the copolymers. The results on the control of the copolymerization were compared to those obtained with and without the presences of TFMA and surfactant. The addition of a low amount of TFMA improved the control of the polymerization of VDF without using any surfactant. Also, the size of particles, assessed by light scattering, was smaller than 200 nm. The addition of TFMA in low proportions, that is, 5 to 10 mol %, enabled us to stabilize the particle size and to decrease the size by one order of magnitude. The emulsifying behavior of TFMA (in low amount in the copolymer, that is, \10 mol %) was similar to those achieved when a surfactant was added. Indeed, neither sedimentation nor destabilization was observed after several days. The reactivity ratios for r TFMA and r VDF were 0 and 1.6 at 80 C, respectively. V V C 2009 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 47: [4710][4711][4712][4713][4714][4715][4716][4717][4718][4719][4720][4721][4722] 2009

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“…aeronautics, 6 microelectronics, 7 optics, 8,9 textile finishing, 10,11 in the nuclear industry, 12 in paints and coatings 13 and military use. 14 chlorotrifuoroethylene, but it is much less dangerous (it is not explosive and has a low toxicity) and is a precursor of thermoplastics or elastomers 4,5 endowed with interesting properties.…”

Section: Introductionmentioning

confidence: 99%

Radical Terpolymerization of 1,1,2-Trifluoro-2-pentafluorosulfanylethylene and Pentafluorosulfanylethylene in the Presence of Vinylidene Fluoride and Hexafluoropropylene by Iodine Transfer Polymerization

et al. 2008

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Iodine transfer terpolymerization of two monomers bearing an SF 5 group, i.e. 1,1,2-trifluoro-2-pentafluorosulfanylethylene (F 2 C=CFSF 5) and pentafluorosulfanylethylene (H 2 C=CHSF 5), with 1,1-difluoroethylene (or vinylidene fluoride, VDF) and hexafluoropropylene (HFP) is presented. These pentafluorosulfanyl monomers present a peculiar reactivity. They do not homopolymerize by conventional radical polymerization, but they co-and terpolymerize with the above fluorinated olefins. The resulting fluorinated terpolymers were characterized by 19 F and 1 H NMR spectroscopies which enabled the assessment of the molar percentages of the three comonomers. Size exclusion chromatography and NMR characterizations were also used to assess the molecular weights, M n , ranging between 260 and 8 400 g/mol. Interestingly, both these pentafluorosulfanyl monomers exhibit different behaviors in that radical terpolymerization in the presence of C 6 F 13 I as a degenerative chain transfer agent. Thus, CF 2 CFSF 5 can be terpolymerized with VDF and HFP with a good control of molecular weight leading fluoropolymers bearing SF 5 groups with low polydispersity index (PDI). Unexpectedly, only two iodide functionalities of the terpolymers namely two end-groups (-CH 2 CF 2 I and-CF 2 CH 2 I) were observed and their proportions were influenced by the number of VDF units. Indeed,-CH 2 CF 2 I functionality decreased when the number of VDFs per chain increased. In contrast to 1,1,2-trifluoro-2-pentafluorosulfanyl ethylene, H 2 C=CHSF 5 could not be terpolymerized by ITP but led to C 6 F 13-[(CH 2 CF 2)-(CH 2 CH(SF 5)] n-I alternating cooligomers of low molecular weight in poor yields (10-20%). The formation of by-product (C 6 F 13 CH=CHSF 5 monoadduct obtained by dehydrofluorination) was also observed, which corresponds to the elimination of HI from the 1:1 adduct. In the last part, the thermal properties were discussed. The presence of SF 5 group decreases the Tg of fluoropolymers whereas the thermal stabilities depended on the molecular weights.

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Comparative study of mask architectures for EUV lithography

Cited by 10 publications

References 17 publications

Iodine Transfer Terpolymerization of Vinylidene Fluoride, α-Trifluoromethacrylic Acid and Hexafluoropropylene for Exceptional Thermostable Fluoropolymers/Silica Nanocomposites

Iodine Transfer Terpolymerization of Vinylidene Fluoride, α-Trifluoromethacrylic Acid and Hexafluoropropylene for Exceptional Thermostable Fluoropolymers/Silica Nanocomposites

Iodine transfer copolymerization of vinylidene fluoride and α‐trifluoromethacrylic acid in emulsion process without any surfactants

Radical Terpolymerization of 1,1,2-Trifluoro-2-pentafluorosulfanylethylene and Pentafluorosulfanylethylene in the Presence of Vinylidene Fluoride and Hexafluoropropylene by Iodine Transfer Polymerization

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