2015
DOI: 10.1179/1743284714y.0000000651
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Comparative study of porous anodic alumina: Effects of aluminium deposition methods

Abstract: This article reports on the comparative study of the fabrication of porous anodic alumina films by anodisation of the aluminium films on glass substrates which were deposited by direct current sputtering and electron beam evaporation methods. The relationship between surface morphology of the deposited aluminum films and porous anodic alumina films was investigated. A more uniform and ordered porous anodic alumina was obtained by fabricating from electron beam evaporation deposited aluminium film with smaller … Show more

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Cited by 7 publications
(5 citation statements)
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“…For some optical sensors, it is necessary to form PAA film on a transparent substrate. There are many reports on studying the formation of PAA from deposited Al films on glass [ 11 , 14 19 ]. Analysis of published data shows that during the formation of PAA from aluminum film on any substrate, not only the process of anodic oxidation affects the outcome but also the way of deposition of aluminum films [ 20 ], the impurity in the film [ 21 ], the heat treatment of aluminum film [ 22 ], the thickness of Al film [ 23 ], and the presence of a conductive underlayer on an insulating substrate [ 17 , 18 ].…”
Section: Introductionmentioning
confidence: 99%
“…For some optical sensors, it is necessary to form PAA film on a transparent substrate. There are many reports on studying the formation of PAA from deposited Al films on glass [ 11 , 14 19 ]. Analysis of published data shows that during the formation of PAA from aluminum film on any substrate, not only the process of anodic oxidation affects the outcome but also the way of deposition of aluminum films [ 20 ], the impurity in the film [ 21 ], the heat treatment of aluminum film [ 22 ], the thickness of Al film [ 23 ], and the presence of a conductive underlayer on an insulating substrate [ 17 , 18 ].…”
Section: Introductionmentioning
confidence: 99%
“…However, it is necessary to consider that for PAA templates fabricated by a two-step anodization technique, a thick sacrificial layer is necessary to pre-texture the aluminium surface. However, the evaporated/sputtered aluminium thickness typically is in the order of micrometres [ 182 ]. Subsequently, the regularity of the pores can be severely reduced since the pore structure cannot reach a honeycomb-like structure at the end of the first anodization process.…”
Section: Synthesis Of Carbon Nanostructures Within Paa Templatesmentioning
confidence: 99%
“…This is because large quantity of hydroxide is produced in the alkaline solution and it serves as the source of oxygen to grow the oxide gate layer. [35][36][37] This is sometimes known as wet oxidation process. On the other hand, if the dielectric layer is grown by direct heating inside a furnace in an oxidation-contained ambient, it is then called the dry oxidation process.…”
Section: Anodisation Of Thin Film and Growth Modesmentioning
confidence: 99%