Comparison among XAES, PELS and XPS techniques for evaluation of Sp2 percentage in a-C:H

Lascovich, J.; Scaglione, S.

doi:10.1016/0169-4332(94)90026-4

Cited by 136 publications

(104 citation statements)

References 31 publications

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“…10,13 The carbon atoms hybridize as sp 3 (typical diamond structure), sp 2 (two-dimensional graphite layered structure) or sp 1 (one-dimensional structure). The amorphous and hydrogenated amorphous carbon usually contains a mixture of C sp 3 and C sp 2 hybridizations with a negligible number of C sp 1 hybridizations. Their fraction may be determined by several methods.…”

Section: Introductionmentioning

confidence: 99%

“…The recent attention focused on different carbon-based materials, like hydrogenated amorphous carbon (a-C:H), [1][2][3][4][5][6][7] graphite, [1][2][3][4]8,9 highly oriented pyrolytic graphite (HOPG), 8 fullerene, 4,8 carbon nanotubes (CNT) 10 and nanocrystalline diamond (NCD) 1-3,9,11,12 is due to their potential industrial applications and unique combinations of mechanical, electrical and optical properties in the infrared region. The microscopic physical and chemical properties of carbon materials depend strongly on the C sp 2 /sp 3 ratio as well.…”

Section: Introductionmentioning

confidence: 99%

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Electron Spectra Line Shape Analysis of Highly Oriented Pyrolytic Graphite and Nanocrystalline Diamond

et al. 2010

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The X-ray excited Auger electron spectroscopy (XAES), X-ray photoelectron spectroscopy (XPS) and elastic peak electron spectroscopy (EPES) methods were applied in investigating samples of nanocrystalline diamond and highly oriented pyrolytic graphite of various C sp 2 /sp 3 ratios, crystallinity conditions and grain sizes. The composition at the surface was estimated from the XPS. The C sp 2 /sp 3 ratio was evaluated from the width of the XAES first derivative C KLL spectra and from fitting of XPS C 1s spectra into components. The pattern recognition (PR) method applied for analyzing the spectra line shapes exhibited high accuracy in distinguishing different carbon materials. The PR method was found to be a potentially useful approach for identification, especially important for technological applications in fields of materials engineering and for controlling the chemical reaction products during synthesis.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Electron Spectra Line Shape Analysis of Highly Oriented Pyrolytic Graphite and Nanocrystalline Diamond

et al. 2010

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“…The energy resolution of that analyzer had a ΔE/E ratio of 0.6%. The sp 3 content of the films have been determined by AES from the broadening of the C KVV (or equivalent C KLL ) peak [35][36][37].…”

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confidence: 99%

Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films

Sarakinos

Braun

Zilkens

et al. 2012

Surface and Coatings Technology

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Amorphous carbon films are deposited employing high power impulse magnetron sputtering (HiPIMS) at pulsing frequencies of 250 Hz and 1 kHz. Films are also deposited by direct current magnetron sputtering (dcMS), for reference. In both HiPIMS and dcMS cases, unipolar pulsed negative bias voltages up to 150 V are applied to the substrate to tune the energy of the positively charged ions that bombard the growing film. Plasma analysis reveals that HiPIMS leads to generation of a larger number of ions with larger average energies, as compared 2 to dcMS. At the same time, the plasma composition is not affected, with Ar + ions being the dominant ionized species at all deposition conditions. Analysis of the film properties shows that HiPIMS allows for growth of amorphous carbon films with sp 3 bond fraction up to 45% and density up to 2.2 gcm -3 . The corresponding values achieved by dcMS are 30% and 2.05 gcm -3 , respectively. The larger fraction of sp 3 bonds and mass density found in films grown by HiPIMS are explained in light of the more intense ion irradiation provided by the HiPIMS discharge as compared to the dcMS one.

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“…4. From the analysis of a Nixon industrial diamond and a pure graphitic sample two extreme values for D of 14.3 eV and 22.5 eV were found, respectively, identical to those reported by Lascovich [19]. The sp 3 fractions were then deduced for all the a-C:H films assuming a linear dependence between the diamond and graphite values [19].…”

Section: Sp 3 Fraction (Xaes)mentioning

confidence: 69%

“…Therefore thickness was measured by masking a small area of the sample with a temperature resistant tape during deposition and then measuring the step formed using a profilometer. sp 3 fractions were determined by X-ray Auger electron spectroscopy (XAES) technique [18][19][20][21][22][23] in a Thermo Fisher 250i spectrometer. The X-ray source was Al K α (1486.6 eV).…”

Section: Methodsmentioning

confidence: 99%

Properties of Ultra Fast Deposited Diamond-Like Hydrogenated Carbon Films

2011

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Hydrogenated amorphous carbon films with diamond like structures have been formed on different substrates at very low energies and temperatures by a plasma enhanced chemical vapor deposition process employing acetylene as the precursor gas. The plasma source was of a cascaded arc type with Ar as carrier gas. The films were grown at very high deposition rates. Deposition on Si, glass and plastic substrates has been studied and the films characterized in terms of sp 3 content, roughness, hardness, adhesion and optical properties. Deposition rates up to 20 nm/s have been achieved at substrate temperatures below 100• C. The typical sp 3 content of 60-75% in the films was determined by X-ray generated Auger electron spectroscopy. Hardness, reduced modulus and adhesion were measured using a MicroMaterials Nano Test Indenter/Scratch tester. Hardness was found to vary from 4 to 13 GPa depending on deposition conditions. Adhesion was significantly influenced by the substrate temperature and in situ DC cleaning. Hydrogen content in the film was measured by a combination of the Fourier transform infrared and Rutherford backscattering techniques. Advantages of these films are: low ion energy and deposition temperature, very high deposition rates, low capital cost of the equipment and the possibility of film properties being tailored according to the desired application.

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Comparison among XAES, PELS and XPS techniques for evaluation of Sp2 percentage in a-C:H

Cited by 136 publications

References 31 publications

Electron Spectra Line Shape Analysis of Highly Oriented Pyrolytic Graphite and Nanocrystalline Diamond

Electron Spectra Line Shape Analysis of Highly Oriented Pyrolytic Graphite and Nanocrystalline Diamond

Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films

Properties of Ultra Fast Deposited Diamond-Like Hydrogenated Carbon Films

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