2017
DOI: 10.1063/1.4981128
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Comparison between helium plasma induced surface structures in group 5 (Nb, Ta) and group 6 elements (Mo, W)

Abstract: Group 5 elements (niobium and tantalum) and group 6 elements (molybdenum and tungsten) were exposed to helium plasma, and the resulting surface structures were observed by electron microscopy. Group 5 elements showed hole structures, where the size of the holes ranged from several tens of nm to a few hundred nm in diameter, while group 6 elements showed fiber-like structures. As a first step in understanding such differences, the difference in helium agglomeration energies and changes in the stress tensor as a… Show more

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Cited by 21 publications
(11 citation statements)
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“…Those initial morphology changes are thought to develop into fiberform nanostructures. Similar fuzzy nanostructure growth has been identified on other metals including molybdenum, nickel, titanium, iron, rhenium, and tantalum [16][17][18][19][20][21], indicating that significant morph ology changes accompanied by the He bubble growth are common to many metals. As the plasma irradiation's bottom up approach only requires a one-step dry process [22], materials fabricated using this process are anticipated to be useful for industrial application.…”
Section: Introductionsupporting
confidence: 61%
“…Those initial morphology changes are thought to develop into fiberform nanostructures. Similar fuzzy nanostructure growth has been identified on other metals including molybdenum, nickel, titanium, iron, rhenium, and tantalum [16][17][18][19][20][21], indicating that significant morph ology changes accompanied by the He bubble growth are common to many metals. As the plasma irradiation's bottom up approach only requires a one-step dry process [22], materials fabricated using this process are anticipated to be useful for industrial application.…”
Section: Introductionsupporting
confidence: 61%
“…The physical and chemical properties of the fuzzy nanostructures have also been investigated in order to advance plasma applications. In addition, the formation of nanostructures due to helium-plasma irradiation has been confirmed for several metals other than tungsten [7][8][9].…”
Section: Introductionmentioning
confidence: 89%
“…[7,8] Various processing methods have been used to fabricate vanadium oxide thin films and nanostructures. For example, pulsed laser deposition (PLD), [9] magnetron sputtering, [10] chemical vapor deposition (CVD), [11] plasma-enhanced CVD, [12] solgel method, [13,14] and sol-gel dip coating [15] were used to deposit thin films; hydrothermal process, [16] thermal pyrolysis, [17] electrospinning, [18] ion beam sputtering, [19] and helium (He) plasma treatment [5] were used for nanostructuring.Among these methods, He plasma treatment is a novel method, which forms fiberform nanostructures (FNs) called fuzz on various metals including tungsten, molybdenum, rhenium, rhodium, tantalum, platinum, niobium, and V. [5,[20][21][22][23][24][25] The process is a bottom-up process accompanied by the growth of He bubbles on the top surface layer (thickness of 100-200 nm) and the formation and diffusion of adatoms. [26][27][28][29][30] Application of oxidized fuzz has been studied including the application of tungsten trioxides (WO 3 ) as gas sensors [31][32][33][34][35][36] WO 3 , iron oxides, [37,38] titania, [39,40] and V oxides [5] as photoelectrodes.…”
mentioning
confidence: 99%
“…Among these methods, He plasma treatment is a novel method, which forms fiberform nanostructures (FNs) called fuzz on various metals including tungsten, molybdenum, rhenium, rhodium, tantalum, platinum, niobium, and V. [5,[20][21][22][23][24][25] The process is a bottom-up process accompanied by the growth of He bubbles on the top surface layer (thickness of 100-200 nm) and the formation and diffusion of adatoms. [26][27][28][29][30] Application of oxidized fuzz has been studied including the application of tungsten trioxides (WO 3 ) as gas sensors [31][32][33][34][35][36] WO 3 , iron oxides, [37,38] titania, [39,40] and V oxides [5] as photoelectrodes.…”
mentioning
confidence: 99%