Comparison of CrN Coatings Prepared Using High-Power Impulse Magnetron Sputtering and Direct Current Magnetron Sputtering

Abstract

Chromium Nitride (CrN) coatings have widespread utilization across numerous industrial applications, primarily attributed to their excellent properties. Among the different methods for CrN coating synthesis, direct current magnetron sputtering (DCMS) has been the dominant technique applied. Nonetheless, with the expanded applications of CrN coatings, the need for enhanced mechanical performance is concurrently escalating. High-power impulse magnetron sputtering (HiPIMS), an innovative coating deposition approach developed over the past three decades, is gaining recognition for its capability of yielding coatings with superior mechanical attributes, thereby drawing significant research interest. Considering that the mechanical performance of a coating is fundamentally governed by its microstructural properties, a comprehensive review of CrN coatings fabricated through both techniques is presented. This review of recent literature aims to embark on an insightful comparison between DCMS and HiPIMS, followed by an examination of the microstructure of CrN coatings fabricated via both techniques. Furthermore, the exploration of the underlying factors contributing to the disparities in mechanical properties observed in CrN coatings is revealed. An assessment of the advantages and potential shortcomings of HiPIMS is discussed, offering insight into CrN coating fabrication.

Influence of HiPIMS Pulse Widths on the Structure and Properties of Copper Films

“…High-power pulse magnetron sputtering (HiPIMS) enables the target material to achieve higher power density by applying a high-power pulse power supply to the magnetron sputtering process [9,10]. The most significant feature of HiPIMS is the ability to generate high-ionization-rate plasma during the sputtering process [11]. High-ionizationrate plasma bombards the substrate under substrate bias, resulting in a thin film with good density and high adhesion between the film and substrate [5,12,13].…”

Solid Lubrication System and Its Plasma Surface Engineering: A Review

“…These free radicals undergo cross-linking and re-bond to form a network structure, thereby improving the surface performance of the material [21,22]. By using different plasma preparation techniques and solid lubrication material system components, the lubrication performance of the coating improved to meet the needs of special working conditions [23][24][25][26][27]. This article elaborates on the plasma preparation methods of lubrication coatings, introduces relevant solid lubrication coating systems, and prospects for the future development trend of solid lubrication coatings.…”

High-Power Impulse Magnetron Sputter-Deposited Chromium-Based Coatings for Corrosion Protection

“…High-power impulse magnetron sputtering (HIPIMS) has emerged and has been increasingly applied in various industries in recent years. This innovative technique is capable of generating dense and exceptionally well-adhered coatings, essential for fulfilling the requirements of both corrosion protection and decorative layers due to its elevated ionization degree, high plasma density, and substantial ion energy [14][15][16]. Numerous studies have sought to deposit CrN films using HIPIMS.…”