Comparison of dry etching of PMMA and polycarbonate in diffusion pump-based O2 capacitively coupled plasma and inductively coupled plasma

Park, J.H.; Lee, S.H.; Choi, Kwang Pyo; Noh, H.S.; Lee, J.W.; Pearton, S. J.

doi:10.1016/j.tsf.2010.02.053

Cited by 15 publications

(7 citation statements)

References 9 publications

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“…For PMMA, on the other hand, the ability of the polymer to unzip its backbone repeat elements after creation of a radical amplifies the impact of the formation of backbone radicals by plasma hydroxyl radicals. Thus, in contrast to Park et al,41 we interpret the observed faster etch rate of PMMA compared with polycarbonate as a consequence of the ability of the former polymer to undergo depolymerisation by backbone unzipping, whereas polycarbonate must be etched a radical at a time, with no amplification by unzipping possible. The unzipping by radical propagation leads to a significantly faster etch rate for PMMA as the resultant monomer units volatilise readily.…”

Section: Discussioncontrasting

confidence: 98%

“…Etching of PMMA and polycarbonate has been discussed by Hamidi38 and polymer etching due to attack from plasmas of gases such as argon, helium, hydrogen and nitrogen has been reported by Hegemann et al,31 Nelea et al,39 Fozza et al40 and Zajickova et al16 Of particular relevance is the work done by Park et al41 as they directly compared the dry etch behaviour of PMMA and polycarbonate in an RF‐driven oxygen plasma and reported a faster etch rate for PMMA than for polycarbonate. Their explanation links the etch rate with the melting points of the two polymers.…”

Section: Discussionmentioning

confidence: 99%

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Etching and Deposition Mechanism of an Alcohol Plasma on Polycarbonate and Poly(Methyl Methacrylate): An Adhesion Promotion Mechanism for Plasma Deposited a:SiO_xC_yH_z Coating

Hall

Murphy

Griesser

2012

Plasma Processes & Polymers

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Favourable properties of polycarbonate have led to it replacing glass in many applications; however it does require a protective coating. Plasma deposited protective coatings of amorphous SiOxCyHz have, however, shown marginal adhesion to polycarbonate. This study has shown that plasma pre‐treatments using vapours from the alcohol family improved the coating adhesion on two types of polycarbonate. It is suggested that these plasmas both etch the polycarbonate and deposit a thin plasma polymer layer. It was previously reported that a similar adhesion improvement was obtained on PMMA, however under shorter treatment times. The variation has been linked to the difference in etch rates of the two polymers. This has led to an improved understanding of the etching mechanism of both polymers when exposed to radicals.

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Section: Discussioncontrasting

confidence: 98%

Section: Discussionmentioning

confidence: 99%

Etching and Deposition Mechanism of an Alcohol Plasma on Polycarbonate and Poly(Methyl Methacrylate): An Adhesion Promotion Mechanism for Plasma Deposited a:SiO_xC_yH_z Coating

Hall

Murphy

Griesser

2012

Plasma Processes & Polymers

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“…In particular, short plasma nanotexturing modifies the chemistry and the topography of the polymeric surface without affecting the bulk properties, creates nanoscale surface roughness (nanotexture) and is used for controlling the optical, wetting, and flow properties, as well as biomolecule adsorption and cell adhesion on such surfaces . This surface treatment is used in polymer‐based microdevices, for flow control of micro‐/nanofilters, flexible electronics, and bio‐MEMS . The O 2 plasma modification of a PMMA surface results in high aspect ratio (HAR) topography with pillar‐like structures .…”

Section: Introductionmentioning

confidence: 99%

Nanoscale Mechanical and Tribological Properties of Plasma Nanotextured COP Surfaces with Hydrophobic Coatings

Dragatogiannis

Koumoulos

Ellinas

et al. 2015

Plasma Process. Polym.

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Cyclo olefin polymer (COP) surfaces, treated in oxygen plasmas under highly anisotropic conditions to favor roughness formation, are coated with thin hydrophobic films to form surfaces of enhanced hydrophobicity. As hydrophobic coatings, plasma-deposited fluorocarbon or spin-coated Teflon thin films are implemented. Nanoindentation and nanoscratch experiments have been employed to elucidate the effect of plasma treatment on the mechanical and tribological performance of the synthesized materials. It is shown that short-time plasma treatment slightly changes mechanical and tribological properties of plasma-nanotextured COP, as compared to untreated. The plasma deposited hydrophobic film on the COP surfaces presents good adhesion and it effectively protects the surfaces, reducing plastic deformation.

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“…Polymers are extensively applied in many areas of medicine due to its bioinert characteristic and its ease of tailoring their physical and chemical properties for a given purpose. Polymethyl methacrylate (PMMA) is also widely used in many areas of life due to its superior chemical and physical properties. It has excellent light transmittance, low density, and mechanical properties (impact strength, toughness) superior to glass .…”

Section: Introductionmentioning

confidence: 99%

Solvent‐ and catalysts‐free immobilization of tannic acid and polyvinylpyrrolidone onto PMMA surface by DBD plasma

Klébert

Károly

Késmárki

et al. 2017

Plasma Processes & Polymers

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Polyvinylpyrrolidone (PVP) and tannic acid (TAN) macromolecules were attached to polymethyl methacrylate (PMMA) surface in a two-step approach in order to establish a tailored tissue-friendly surface layer. First PMMA surface was activated by an air diffuse coplanar surface barrier discharge plasma and subsequently coated with these macromolecules. PVP and TAN which has antibacterial effects are widely used in food and drug industry, however have never applied for polymer surface modification. Throughout characterization measurements confirm that during plasma treatment oxygen containing functional groups (-OH, -C=O, -COOH) incorporate in the surface. 1HNMR spectroscopy verified the strong H-bonds between PVP and TAN, which rendered the layer-by-layer as- Many researches have been carried out to overcome this shortcoming of polymers including PMMA.A common approach to make the surface more hydrophilic is to modify the surface chemistry. Due to the chemical inertness of the polymeric materials their surface modification means that first they shall undergo surface activation before subsequent covalent functionalisation (Fig.1.). It was found that a hydrophilic surface created by surface modification and formation of new functional groups on the surface by oxygen plasma treatment greatly inhibited bacterial adhesion to PMMA surface [8].The hydrophilic properties, however, usually does not last long due to the ageing effect of such treatment [9]. The speed of ageing is affected by several operating factors of the treatment, includ-

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Comparison of dry etching of PMMA and polycarbonate in diffusion pump-based O2 capacitively coupled plasma and inductively coupled plasma

Cited by 15 publications

References 9 publications

Etching and Deposition Mechanism of an Alcohol Plasma on Polycarbonate and Poly(Methyl Methacrylate): An Adhesion Promotion Mechanism for Plasma Deposited a:SiO_xC_yH_z Coating

Etching and Deposition Mechanism of an Alcohol Plasma on Polycarbonate and Poly(Methyl Methacrylate): An Adhesion Promotion Mechanism for Plasma Deposited a:SiO_xC_yH_z Coating

Nanoscale Mechanical and Tribological Properties of Plasma Nanotextured COP Surfaces with Hydrophobic Coatings

Solvent‐ and catalysts‐free immobilization of tannic acid and polyvinylpyrrolidone onto PMMA surface by DBD plasma

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Comparison of dry etching of PMMA and polycarbonate in diffusion pump-based O2 capacitively coupled plasma and inductively coupled plasma

Cited by 15 publications

References 9 publications

Etching and Deposition Mechanism of an Alcohol Plasma on Polycarbonate and Poly(Methyl Methacrylate): An Adhesion Promotion Mechanism for Plasma Deposited a:SiOxCyHz Coating

Etching and Deposition Mechanism of an Alcohol Plasma on Polycarbonate and Poly(Methyl Methacrylate): An Adhesion Promotion Mechanism for Plasma Deposited a:SiOxCyHz Coating

Nanoscale Mechanical and Tribological Properties of Plasma Nanotextured COP Surfaces with Hydrophobic Coatings

Solvent‐ and catalysts‐free immobilization of tannic acid and polyvinylpyrrolidone onto PMMA surface by DBD plasma

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Product

Resources

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Etching and Deposition Mechanism of an Alcohol Plasma on Polycarbonate and Poly(Methyl Methacrylate): An Adhesion Promotion Mechanism for Plasma Deposited a:SiO_xC_yH_z Coating

Etching and Deposition Mechanism of an Alcohol Plasma on Polycarbonate and Poly(Methyl Methacrylate): An Adhesion Promotion Mechanism for Plasma Deposited a:SiO_xC_yH_z Coating