Comparison of effective transverse piezoelectric coefficientse_31,fof Pb(Zr,Ti)O₃thin films between direct and converse piezoelectric effects

Abstract

We evaluated the effective transverse piezoelectric coefficients (e 31,f ) of Pb(Zr,Ti)O 3 (PZT) thin films from both the direct and converse piezoelectric effects of unimorph cantilevers. (001) preferentially oriented polycrystalline PZT thin films and (001)/(100) epitaxial PZT thin films were deposited on (111)Pt/Ti/Si and (001)Pt/MgO substrates, respectively, by rf-magnetron sputtering, and their piezoelectric responses owing to intrinsic and extrinsic effects were examined. The direct and converse je 31,f j values of the polycrystalline PZT thin films were calculated as 6.4 and 11.5-15.0 C/m 2 , respectively, whereas those of the epitaxial PZT thin films were calculated as 3.4 and 4.6-4.8 C/m 2 , respectively. The large je 31,f j of the converse piezoelectric property of the polycrystalline PZT thin films is attributed to extrinsic piezoelectric effects. Furthermore, the polycrystalline PZT thin films show a clear nonlinear piezoelectric contribution, which is the same as the Rayleigh-like behavior reported in bulk PZT. In contrast, the epitaxial PZT thin films on the MgO substrate show a piezoelectric response owing to the intrinsic and linear extrinsic effects, and no nonlinear contribution was observed.

Crystallographic contributions to piezoelectric properties in PZT thin films

“…The | e 31, f | increased proportionally with the electric field and gradually plateaued at higher electric fields. This behavior is consistent with our previous study 16 . The | e 31, f | value ranged from 6–14 C/m 2 , which was higher than that of the epitaxial PZT thin film.…”

“…The derivation of Eq. (1) is described in detail in our previous paper 16 . Figure 6(b) compares the piezoelectric coefficients for the epitaxial PZT thin film.…”

“…The intrinsic contribution is concerned with crystal lattice deformation (such as elongation and shrinkage), while the extrinsic contribution originates from collective lattice distortions caused by domain rotations or phase transitions. Our previous report demonstrated that the piezoelectric properties of polycrystalline PZT thin films was larger than that of epitaxial PZT thin films 16 . In this study, to understand the crystallographic factors contributing to the macroscopic piezoelectric properties, we performed in-situ X-ray diffraction (XRD) measurements 18–24 on PZT thin films using a synchrotron radiation source.…”

Study on footstep power generation using piezoelectric tile

“…In this method, the energy conversion is based on piezoelectric effect. There are two categories of piezoelectric effect which are direct piezoelectric effect and converse piezoelectric effect [10,11] The direct piezoelectric effect is the ability of the piezoelectric transducer to convert the mechanical energy to electrical energy [12][13][14]. When vibration or mechanical stress are applied on the piezoelectric transducer, it will deformed and produced electric charge.…”

Piezoelectric vibration energy harvesters with stretched and multistacked organic ferroelectric films

“…Vibration harvesters using inorganic piezoelectric materials have been investigated. [2][3][4][5] The resonant frequencies of harvesters with inorganic materials were higher than those emanating from environmental vibrations. 6,7) Hence, environmental vibration energy has rarely been utilized efficiently.…”