2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) 2013
DOI: 10.1109/memsys.2013.6474358
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Comparison of f-Q scaling in wineglass and radial modes in ring resonators

Abstract: Low phase noise MEMS oscillators necessitate resonators with high f-Q. Resonators achieving high f-Q (mechanical frequency-quality factor product) close to the thermoelastic damping (TED) limit have been demonstrated at expense of feed-through. Here we present a study comparing frequency scaling of quality factors of wineglass and radial modes in a ring resonator using an opto-mechanical two port transmission measurement. Higher harmonics of the wineglass mode show an increasing trend in the f-Q product, as co… Show more

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Cited by 8 publications
(6 citation statements)
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“…125 While this system offers unmatched simplicity, small form-factor, and low power requirements, it has thus-far failed to match the performance of the larger quartz oscillator systems, which operate at similar oscillation frequencies (MHz range). While optomechanical devices are more easily scalable to higher frequencies (up to 10 GHz has been achieved 126,127 ), doing so greatly increases the regenerative oscillation threshold power, which is proportional to the mechanical frequency squared. This fact combined with the conflicting demand of low mass for low threshold and high mass for lower phase-noise leads one to follow an alternative hybrid approach, which I label the OMO (see Figure 7(c)).…”
Section: Optomechanical Oscillatorsmentioning
confidence: 99%
“…125 While this system offers unmatched simplicity, small form-factor, and low power requirements, it has thus-far failed to match the performance of the larger quartz oscillator systems, which operate at similar oscillation frequencies (MHz range). While optomechanical devices are more easily scalable to higher frequencies (up to 10 GHz has been achieved 126,127 ), doing so greatly increases the regenerative oscillation threshold power, which is proportional to the mechanical frequency squared. This fact combined with the conflicting demand of low mass for low threshold and high mass for lower phase-noise leads one to follow an alternative hybrid approach, which I label the OMO (see Figure 7(c)).…”
Section: Optomechanical Oscillatorsmentioning
confidence: 99%
“…The reported work mainly focuses on one or several loss sources on certain order WGMs. The anchor loss of WGM resonators has been qualitatively studied in [ 23 , 24 ], which tends to be negligible with increasing mode order, while the dominant dissipations of the high-order modes have not been clarified. The effects of thermoelastic damping (TED) and phonon-phonon interaction damping (PPID) on WGM resonators were analyzed in [ 25 ].…”
Section: Introductionmentioning
confidence: 99%
“…For single-frequency WGM resonators, certain loss mechanisms were studied [11][12][13][14]. However, for multi-mode WGM resonators with wide frequency coverages, up to now, the dominant dissipations of each mode under different conditions have not been clarified, although it is significant in releasing their high-end potentials.…”
Section: Introductionmentioning
confidence: 99%