Comparison of lapping performance between fixed agglomerated diamond pad and fixed single crystal diamond pad

Wang, Zikun; Niu, Fengli; Zhu, Yongwei; Li, Jun; Wang, Jianbin

doi:10.1016/j.wear.2019.202963

Cited by 22 publications

(7 citation statements)

References 17 publications

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“…So, the W3-5-type hydrophilic FAP was selected and used in this study, which was made of diamond abrasives, hydrophilic polymer, copper powder and other additives. The detailed elemental content and mass percentage of it are shown in Table 1 (Wang et al , 2019). To ensure the consistency of the surface morphology, the sample surface of FAP was dressed using the ZPY300 lapping and polishing machine (ZPY300, Shenyang Maike material processing equipment Co., Ltd., Shenyang) for 5 min before the test.…”

Section: Methodsmentioning

confidence: 99%

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Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Tian,

Wu,

Pang

et al. 2023

ILT

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Purpose This study aims to clarify the influence mechanism of polishing solution type on the glazing evolution of fixed abrasive pad under different interfacial pressure conditions. Design/methodology/approach The tribological experiments were carried out on the friction and wear machinery with W3-5 diamond fixed abrasive pad and quartz glass workpiece under three polishing solution types of five pressure conditions. The changes of surface morphology, porosity and hardness of fixed abrasive pad were detected by white light interferometer, optical microscope and shore hardness tester. Findings The results showed that the glazed phenomenon of fixed abrasive pad is occurred after a certain time, which is more obvious with the increasing of interfacial pressures. The polishing solution type has a significant effect on the glazing time, although the glazed phenomenon is inevitable. The mechanism of it is that the micro-convex peaks on the surface of the fixed abrasive pad are easily wear, and the pores are blocked by the accumulation of waste debris generated during the experiment process. Thus, a smooth and high-density hard layer is formed on the surface of the fixed abrasive pad which induces the decreasing of the friction coefficient and surface roughness value. For selected polishing solution types, the wear rate of micro-convex peaks is different due to the corrosion action difference with polishing pad surface. Originality/value The main contribution of this work is to provide a new investigating method for further understanding the glazing evolution mechanism of fixed abrasive pad. Peer review The peer review history for this article is available at: https://publons.com/publon/10.1108/ILT-08-2023-0257/

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Section: Methodsmentioning

confidence: 99%

“…First, the polishing pad conditioning is the time-consuming process that reduces the polishing efficiency in CMP process (Zhou et al , 2008; Tsai and Yang, 2012). In addition, a severe wear on the polishing pad surface is inevitable, which reduces the service life of it (Wang et al , 2019; Shin et al , 2016).…”

Section: Introductionmentioning

confidence: 99%

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Tian,

Wu,

Pang

et al. 2023

ILT

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“…Figure 2 shows the processing equipment and schematic diagram. An FAP of type W7 was chosen for the lapping experiments, as shown in Figure 3; the preparation process was taken from the literature [23]. Deionized water was chosen as the lapping slurry.…”

Section: Experimental Equipmentmentioning

confidence: 99%

An Exploration of the Influence of Abrasive Water Jet Pressure on the Friction Signal Characteristics of Fixed Abrasive Lapping Quartz Glass Based on HHT

et al. 2023

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Abrasive water jetting is an effective dressing method for a fixed abrasive pad (FAP) and can improve FAP machining efficiency and the impact of abrasive water jet (AWJ) pressure on the dressing effect; moreover, the machining state of FAP after dressing has not been thoroughly studied. Therefore, in this study, the FAP was dressed by using AWJ under four pressures, and the dressed FAP was subjected to lapping experiments and tribological experiments. Through an analysis of the material removal rate, FAP surface topography, friction coefficient, and friction characteristic signal, the influence of AWJ pressure on the friction characteristic signal in FAP processing was studied. The outcomes show that the impact of the dressing on FAP rises and then falls as the AWJ pressure increases. The best dressing effect was observed when the AWJ pressure was 4 MPa. In addition, the maximum value of the marginal spectrum initially rises and then falls as the AWJ pressure increases. When the AWJ pressure was 4 MPa, the peak value of the marginal spectrum of the FAP that was dressed during processing was the largest.

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“…Chen et al [18] prepared agglomerated diamond abrasive for sapphire processing and demonstrated that the aggregate diamond abrasive possesses good micro-cutting ability and can maintain better stability. Wang et al [19] studied the differences between agglomerated diamond abrasive and single crystal diamond abrasive in lapping quartz glass, and investigated the reasons for the failure of single crystal diamond. The results showed that agglomerated diamond has a higher MRR and better surface quality compared to single crystal diamond due to its better self-sharpening property.…”

Section: Introductionmentioning

confidence: 99%

Influence of Binding Agent on the Cutting Performance and Wear Characteristics of Catalytic Composite Abrasive Cluster

Ding,

Wang,

Huang

et al. 2024

Preprint

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Comparison of lapping performance between fixed agglomerated diamond pad and fixed single crystal diamond pad

Cited by 22 publications

References 17 publications

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

An Exploration of the Influence of Abrasive Water Jet Pressure on the Friction Signal Characteristics of Fixed Abrasive Lapping Quartz Glass Based on HHT

Influence of Binding Agent on the Cutting Performance and Wear Characteristics of Catalytic Composite Abrasive Cluster

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