2013
DOI: 10.1016/j.vacuum.2012.04.048
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Comparison of low-pressure DC glow discharge and dielectric barrier discharge in CO2-laser mixture by optical emission spectroscopy

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Cited by 3 publications
(2 citation statements)
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“…Argon discharge with an oxygen admixture is used extensively as a source of oxygen radicals, excited particles (as a chemical reaction catalyst), and fast ions (for ion bombardment). Such a discharge has many technological applications in medicine, sterilization, lasers, plasma etching, and so on. The atomic oxygen and molecular oxygen metastable states are usually required for effective operation of industrial plasma devices.…”
Section: Introductionmentioning
confidence: 99%
“…Argon discharge with an oxygen admixture is used extensively as a source of oxygen radicals, excited particles (as a chemical reaction catalyst), and fast ions (for ion bombardment). Such a discharge has many technological applications in medicine, sterilization, lasers, plasma etching, and so on. The atomic oxygen and molecular oxygen metastable states are usually required for effective operation of industrial plasma devices.…”
Section: Introductionmentioning
confidence: 99%
“…La descarga de barrera dieléctrica es ampliamente utilizada a nivel industrial para la generación de ozono [15,[99][100][101], además se utiliza para la fabricación de semiconductores, láseres de CO2 de alta potencia [102] destinados a soldadura y corte de metal, etc. La temperatura relativamente baja del DBD lo convierte en un método atractivo para la generación de plasma a presión atmosférica , por ejemplo para mejorar las propiedades físicas y químicas de film de PP [103], mejorar la adhesión de diferentes substratos poliméricos como el polietileno, PP, poliestireno o polietilen tereftalato [104,105],…”
Section: Tecnología De Plasmaunclassified