Comparison of magnetoimpedance behaviors in meander CoFeNiSiB amorphous ribbon for deformation sensing applications

Abstract

In this work, micro-ribbon strips and meanders based on CoFeNiSiB amorphous ribbons were fabricated by using the lithography technique and chemical etching. Flat and curved holders with different radius of curvature were obtained via 3D printing techniques for GMI testing. Longitudinal and transverse GMI (LGMI and TGMI) behaviors of micro-ribbon sensors in different bending directions and degrees were systematically investigated. The results show the LGMI and TGMI effects of micro-ribbon meanders with one turn is most sensitive to bending. It can be used in the development of deformation sensors. In addition, there is a linear range of field in the LGMI and TGMI curves of micro ribbons under different bending conditions, and the sensitivity of micro-ribbon sensors shows no significant change in the range. In particular, the micro-ribbon meanders with three turns are the least sensitive to bending deformation and can be used to develop stable and flexible GMI sensors for wearable electronics devices.

Enhanced Magnetoimpedance Effect in Co-Based Micron Composite CoFeNiSiB Ribbon Strips Coated by Carbon and FeCoGa Nanofilms for Sensing Applications

“…The micron composite ribbon strips were obtained via designed mask and fabricated by MEMS technology including photolithography, wet etching, and magnetron sputtering. Detailed steps for the patterned single-layer ribbon strip have been reported elsewhere [8]. After finishing the patterned single-layer ribbon strip, the photoresist with a thickness of 1 µm was spin-coated on the surface of the ribbon strip.…”

“…Meander MI elements have become a focus of structural optimization research. Many theoretical and experimental studies on enhanced MI effects in ribbon meanders have been reported [6][7][8][9]. Laser cutting and wet etching are the main fabrication methods for micro-patterned ribbons [10,11].…”